DNA sequencing using a suspended carbon nanotube
First Claim
1. A method of forming a nanodevice for sequencing, the method comprising:
- disposing a bottom metal contact at a location in an insulator that is on a substrate;
disposing a nonconducting material on top of the bottom metal contact and the insulator;
disposing a carbon nanotube on top of the nonconducting material;
disposing top metal contacts on top of the carbon nanotube at the location of the bottom metal contact, wherein the top metal contacts are formed at opposing ends of the carbon nanotube at the location; and
suspending the carbon nanotube over the bottom metal contact at the location, by etching away the nonconducting material under the carbon nanotube to expose the bottom metal contact as a bottom of a trench, while leaving the nonconducting material immediately under the top metal contacts as walls of the trench.
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Accused Products
Abstract
A technique is provided for forming a nanodevice for sequencing. A bottom metal contact is disposed at a location in an insulator that is on a substrate. A nonconducting material is disposed on top of the bottom metal contact and the insulator. A carbon nanotube is disposed on top of the nonconducting material. Top metal contacts are disposed on top of the carbon nanotube at the location of the bottom metal contact, where the top metal contacts are formed at opposing ends of the carbon nanotube at the location. The carbon nanotube is suspended over the bottom metal contact at the location, by etching away the nonconducting material under the carbon nanotube to expose the bottom metal contact as a bottom of a trench, while leaving the nonconducting material immediately under the top metal contacts as walls of the trench.
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Citations
13 Claims
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1. A method of forming a nanodevice for sequencing, the method comprising:
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disposing a bottom metal contact at a location in an insulator that is on a substrate; disposing a nonconducting material on top of the bottom metal contact and the insulator; disposing a carbon nanotube on top of the nonconducting material; disposing top metal contacts on top of the carbon nanotube at the location of the bottom metal contact, wherein the top metal contacts are formed at opposing ends of the carbon nanotube at the location; and suspending the carbon nanotube over the bottom metal contact at the location, by etching away the nonconducting material under the carbon nanotube to expose the bottom metal contact as a bottom of a trench, while leaving the nonconducting material immediately under the top metal contacts as walls of the trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of sequencing, the method comprising:
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translocating a target molecule in a trench on a substrate of a nanodevice, wherein the nanodevice includes a carbon nanotube suspended over the trench by top metal contacts, and includes a bottom metal contact as a bottom of the trench; passing a buffer solution both below and above the carbon nanotube, wherein the carbon nanotube is functionalized with an organic compound having two different functional groups on either end in which one functional group attaches to the carbon nanotube and another functional group interacts with the target molecule; measuring a first current flowing between the top metal contacts through the carbon nanotube; and measuring a change in the first current based on a base of the target molecule in the trench interacting with the carbon nanotube to change a conductance of the carbon nanotube. - View Dependent Claims (11, 12, 13)
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Specification