Acoustic sensor

• US 9,372,111 B2
• Filed: 08/12/2013
• Issued: 06/21/2016
• Est. Priority Date: 08/21/2012
• Status: Active Grant

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Kuntzman, Michael L., Kim, Donghwan, Hewa-Kasakarage, Nishshanka, Hall, Neal A.
• Primary Examiner(s): Saint Surin, J M
• Application Number:
  US13/965,057
• Publication Number:
  US 20140053650A1
• Time in Patent Office: 1,044 Days
• Field of Search: 736/45
• US Class Current: 1/1
• CPC Class Codes: G01H 11/06 by electric means
• CPC Class Codes: G01H 5/00 Measuring propagation velocity of ultrasonic, sonic or infrasonic waves , e.g. of pressure waves
• CPC Class Codes: H04R 17/02 Microphones
• CPC Class Codes: H04R 2201/003 Mems transducers or their use
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182

Abstract

A method of designing and manufacturing an acoustic sensor having a high degree of directivity is disclosed. The sensor includes a rotatable plate that is attached to a substrate with mounts. In one aspect the mounts are freely rotatable and the torque on the plate is measured using detectors disposed on springs that provide a resistance to rotation of the plate. In another aspect the plate is mounted to the substrate with mounts that torsionally deform during rotation of the plate. These detectors measure the torque on the plate according to the torsional deformation of the mounts. Methods of improving the signal to noise ratio of acoustic sensors having multiple detectors are also disclosed.

Claims

1. An acoustic sensor comprising:

a plate having a first distal end opposite a second distal end, the plate configured to rotate about an axis disposed between the first distal end and the second distal end; and

a detector configured to detect a torque of the plate about the axis in response to received acoustic energy and to indicate a direction of a source of the acoustic energy relative to the sensor; and

a first spring attached to the plate, wherein at least a portion of the first spring contains piezoelectric material.

2. The acoustic sensor of claim 1 wherein the first spring is attached to the first distal end configured to resist rotation of the plate.

3. The acoustic sensor of claim 2 wherein the first spring comprises a beam.

4. The acoustic sensor of claim 3 wherein the beam is oriented substantially perpendicular to the first distal end of the plate.

5. The acoustic sensor of claim 3 wherein a first portion of the beam is oriented substantially perpendicular to the first distal end of the plate and a second portion of the beam is oriented substantially parallel to the first distal end of the plate.

6. The acoustic sensor of claim 3 wherein the detector is disposed on at least a portion of the beam.

7. The acoustic sensor of claim 1 wherein the first spring is attached to the first distal end, wherein a second spring is attached to the second distal end, the first and second springs configured to resist rotation of the plate.

8. The acoustic sensor of claim 1 wherein the plate is affixed to a substrate via mounts and the mounts are freely rotatable during torque of the plate.

9. The acoustic sensor of claim 1 wherein the plate is fixed to a substrate via mounts and the mounts torsionally deform during torque of the plate.

10. An acoustic sensor comprising:

a rotatable plate affixed to a substrate via one or more mounts;

the plate configured to apply a torque to the one or more mounts, the torque corresponding to a direction of a source of acoustic energy relative to the sensor; and

at least one detector configured to detect a torque of the plate about an axis.

11. The acoustic sensor of claim 10 wherein the plate further comprises a spring attached to the first distal end configured to resist rotation of the plate.

12. The acoustic sensor of claim 11 wherein the spring comprises a beam.

13. The acoustic sensor of claim 10 wherein the one or more mounts are freely rotatable during torque of the plate.

14. The acoustic sensor of claim 10 wherein the one or more mounts torsionally deform during torque of the plate.

15. A method of sensing a direction of acoustic energy comprising:

receiving acoustic energy on a first distal end and a second distal end of a plate wherein the direction of the source of acoustic energy causes a difference in force applied to the first distal end and the second distal end;

allowing the plate to rotate about an axis in response to the difference in force applied to the first distal end and the second distal end, wherein a spring is attached to the plate, wherein at least a portion of the spring contains piezoelectric material;

measuring the torque causing the plate to rotate with a detector.

16. An acoustic sensor, comprising:

a plate having a first distal end opposite a second distal end, the plate configured to rotate about an axis disposed between the first distal end and the second distal end; and

a plurality of detectors configured to detect a torque of the plate about the axis in response to received acoustic energy and to indicate a direction of a source of the acoustic energy relative to the sensor, wherein each of said detectors are read individually, wherein said readings are added or subtracted to selectively measure modes of said sensor.

17. An acoustic sensor, comprising:

a plate having a first distal end opposite a second distal end, the plate configured to rotate about an axis that is oriented parallel to a y-axis of said sensor;

a substrate affixed to the plate via one or more mounts that torsionally deform during torque of the plate, wherein the one or more mounts deform when the plate is rotated, wherein the one or more mounts impart resistance to rotation of the plate; and

one or more detectors configured to detect the torque of the plate.

18. The acoustic sensor as recited in claim 17, wherein the one or more detectors employ piezoelectric sensors to measure pressure, strain or force in the one or more mounts.

19. The acoustic sensor as recited in claim 17, wherein the one or more detectors comprise:

electrode pairs configured to sense shear stress in the one or more mounts.