Integrated circuit test system and method

• US 9,372,227 B2
• Filed: 03/11/2013
• Issued: 06/21/2016
• Est. Priority Date: 03/11/2013
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Huang, Chung-Han, Wang, Mill-Jer, Peng, Ching-Nen, Lin, Hung-Chih, Lin, Wei-Hsun, Chen, Hao
• Primary Examiner(s): Nguyen, Tung X
• Assistant Examiner(s): HAWKINS, DOMINIC E
• Application Number:
  US13/792,323
• Publication Number:
  US 20140253162A1
• Time in Patent Office: 1,198 Days
• US Class Current: 1/1
• CPC Class Codes: G01R 31/2884 using dedicated test connectors, test elements or test circuits on the IC under test G01R31/2855 takes precedence
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence

Abstract

A system for testing a device under test (DUT) includes a probe card and a test module. The probe card includes probe beds electrically coupled to a circuit board and a first plurality of electrical contacts coupled to the circuit board, which are for engaging respective ones of a plurality of electrical contacts of a test equipment module. Probes are coupled to respective probe beds and are disposed to engage electrical contacts of the DUT. The probe card includes a second plurality of electrical contacts coupled to the circuit board. The first and second pluralities of contacts are mutually exclusive. The test module includes a memory, a processor, and a plurality of electrical contacts electrically coupled to respective ones of the second plurality of electrical contacts of the probe card. The circuit board includes a first electrical path for electrically coupling the test equipment module to the test module.

Claims

1. A system for testing a device under test (DUT), the system comprising:

a probe card including;

a plurality of probe beds electrically coupled to a circuit board;

a first plurality of electrical contacts coupled to the circuit board, the first plurality of contacts for engaging respective ones of a plurality of electrical contacts of a test equipment module configured to provide test signals for testing the DUT;

a plurality of probes coupled to respective probe beds, the plurality of probes disposed to engage a plurality of electrical contacts of the DUT; and

a second plurality of electrical contacts coupled to the circuit board, wherein the first and second pluralities of contacts are mutually exclusive;

at least one test module including a plurality of electrical contacts electrically coupled to respective ones of the second plurality of electrical contacts of the probe card;

wherein the circuit board includes a first electrical path for electrically coupling the test equipment module to the test module,

wherein each probe bed is coupled to one of the contacts in the first plurality of contacts through one of the paths in the first plurality of electrical paths, each probe bed is coupled to one of the contacts in the second plurality of contacts through one of the paths in the second plurality of electrical paths, and the first electrical path is not in the first or second pluralities of electrical paths.

2. The system of claim 1, wherein the circuit board further includes a second electrical path electrically coupling a pair of contacts among the second plurality of electrical contacts.

3. The system of claim 1, wherein the circuit board further includes a second electrical path for electrically coupling the test equipment module to the test module.

4. The system of claim 3, wherein the test module is configured to:

detect a first signal received from the test equipment module via the second electrical path; and

responsive to the detected first signal, send a second signal along the first electrical path.

5. The system of claim 1, wherein the test module is configured to:

detect a first signal received from the test equipment module via one of the paths in the first plurality of electrical paths and one of the paths in the second plurality of electrical paths; and

responsive to the detected first signal, send a second signal along the first electrical path.

6. The system of claim 1, wherein the test module is configured to:

for each probe bed of the probe card, receive a first signal from the test equipment module via one of the paths in the first plurality of electrical paths and one of the paths in the second plurality of electrical paths, wherein the one path in the first plurality of electrical paths and the one path in the second plurality of electrical paths each have an endpoint at the probe bed; and

send a second signal, indicating the status of each path in the first and second pluralities of electrical paths, along the first electrical path.

7. The system of claim 1, including a plurality of the test modules, wherein the circuit board includes respective electrical paths for coupling each test module to the test equipment module.

8. The system of claim 1, wherein the system further comprises the DUT, and a pair of the probes are coupled to a single electrical contact in the DUT.

9. The system of claim 8, wherein the pair includes first and second probes associated with first and second probe beds, respectively, and the circuit board further includes:

a second electrical path coupling the first probe bed and one of the first plurality of electrical contacts; and

a third electrical path coupling the second probe bed and one of the second plurality of electrical contacts.

10. The system of claim 1, wherein the system further comprises the DUT, the plurality of probes includes first and second probes electrically coupled to first and second electrical contacts, respectively, in the DUT, the first and second electrical contacts of the DUT are coupled together, and the circuit board further includes:

a second electrical path coupling a first probe bed, associated with the first probe, to one of the first plurality of electrical contacts; and

a third electrical path coupling a second probe bed, associated with the second probe, to one of the second plurality of electrical contacts.

11. The system of claim 1, wherein the test module further includes:

a processor;

an analog processing module configured to output a feedback signal along the first electrical path;

a digital-to-analog converter configured to convert a digital output of the processor to an analog input of the analog processing module; and

an analog-to-digital converter configured to convert an analog output of the analog processing module to a digital input of the processor.

12. The system of claim 11, wherein the analog processing module is a field programmable analog array.

13. The system of claim 11, wherein the analog processing module is a digital multimeter.

14. A method comprising:

at a test module, providing a first signal;

sending the first signal to a probe card electrically coupled to the test module, wherein the probe card includes a plurality of probe beds coupled to respective probes among a plurality of probes;

detecting a return of the first signal from the probe card;

providing a second signal by a test equipment module electrically coupled to the probe card;

detecting a round-trip propagation of the second signal from the test equipment module to the probe card and back to the test equipment module;

for each path among a plurality of electrical paths through a circuit board of the probe card, sending a third signal along the path to the test module, wherein the path is coupled to a respective probe bed of the probe card; and

sending a fourth signal from the test module to the test equipment module, wherein the fourth signal indicates a status of each path in the first plurality of electrical paths,

wherein first and second probes in the plurality of probes are electrically coupled to first and second electrical contacts, respectively, of a device under test (DUT), and the first and second electrical contacts are coupled together, the method further comprising;

sending a fifth signal from the test equipment module to the test module by way of the first probe, the DUT, and the second probe;

sending a sixth signal from the test module to the test equipment module, wherein the sixth signal indicates a connectivity status of the first and second probes.

15. The method of claim 14, wherein the probe card further includes third and fourth probes both electrically coupled to a third electrical contact of the DUT, the method further comprising:

sending a seventh signal from the test equipment module to the third probe;

sending the seventh signal from the fourth probe to the test module; and

sending an eighth signal from the test module to the test equipment module based on reception of the seventh signal at the test module.

16. The method of claim 14, wherein sending the third signal includes sending along each path serially one after the other.

17. A method comprising:

sending a first signal from a test equipment module to a test module by way of first and second probes among a plurality of probes of a probe card, wherein the first probe is coupled to a first electrical contact of a device under test (DUT), the first electrical contact is coupled to a second electrical contact of the DUT, and the second probe is coupled to the second electrical contact; and

sending a second signal from the test module to the test equipment module, wherein the second signal indicates a connectivity status of the first and second probes;

wherein the plurality of probes further includes third and fourth probes both coupled to a third electrical contact of the DUT, the method further comprising;

sending a third signal from the test equipment module to the test module by way of the third and fourth probes;

sending a fourth signal from the test module to the test equipment module based on reception of the third signal at the test module.