Detection structure for a Z-axis resonant accelerometer

• US 9,377,482 B2
• Filed: 02/28/2014
• Issued: 06/28/2016
• Est. Priority Date: 08/31/2011
• Status: Active Grant

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Comi, Claudia, Corigliano, Alberto, Zerbini, Sarah
• Primary Examiner(s): Chapman, Jr., John
• Application Number:
  US14/193,981
• Publication Number:
  US 20140174183A1
• Time in Patent Office: 851 Days
• Field of Search: 735/142.9
• US Class Current: 1/1
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/0975 by acoustic surface wave resonators or delay lines

Abstract

A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.

Claims

1. A detection structure for a z-axis resonant accelerometer, comprising:

a substrate;

elastic anchorage elements;

an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to said plane;

first and second elastic supporting elements;

a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass;

driving elements coupled to said first resonator element and second resonator element, the driving elements including driving electrodes formed on said substrate and set underneath, and capacitively coupled to, each of said first and second resonator elements; and

first electrical-conduction paths formed on said substrate, the first electrical-conduction paths being configured to contact said driving electrodes, said first electrical-conduction paths not being set underneath said inertial mass.

2. The structure according to claim 1 wherein said second resonator element is positioned externally from said inertial mass.

3. The structure according to claim 1 wherein the inertial mass has a first window, the substrate including:

a central anchor, positioned in the first window, said elastic anchorage elements coupling to said inertial mass to the central anchor in the first window, and extending along said first axis of rotation, said inertial mass having a distribution of mass asymmetrical with respect to said first axis of rotation and being constrained eccentrically to said substrate.

4. The structure according to claim 3 wherein the inertial mass has second and third windows and an outer lateral surface, said first resonator element is positioned in the second window, and said second resonator element is positioned in the third window;

said third window faces outside of said inertial mass; and

said second resonator element has an outer lateral surface flush with and aligned along said horizontal axis with respect to the outer lateral surface of said inertial mass.

5. The structure according to claim 4 wherein said second resonator element is at a maximum distance possible from said first axis of rotation while remaining within outer dimensions of said inertial mass in said plane.

6. The structure according to claim 3 wherein the driving elements are configured to enable resonance driving in rotation about said second axis of rotation and third axis of rotation, respectively.

7. The structure according to claim 1 wherein said first resonator element and said second resonator element are positioned symmetrically with respect to said first axis of rotation, said second axis of rotation and said third axis of rotation being positioned at an equal distance from said first axis of rotation.

8. The structure according to claim 1 wherein said elastic anchorage elements and said first and second elastic supporting elements are folded-beam torsional springs having a main extension along said horizontal axis.

9. The structure according to claim 1 wherein the inertial mass has second and third windows facing outside of said inertial mass;

said first and second resonator elements are set, respectively, in the second and third windows;

said driving electrodes and at least part of said first electrical-conduction paths are positioned to correspond with said second and third windows.

10. The structure according to claim 1, further comprising first and second detection electrodes, formed on said substrate and set underneath, and respectively capacitively coupled to, said first and second resonator elements;

said detection electrodes being configured to enable detection of a variation of resonance frequencies of said first and second resonator elements as a consequence of the inertial movement of said inertial mass about said first axis of rotation.

11. The structure according to claim 10, further comprising second electrical-conduction paths formed on said substrate and configured to contact said detection electrodes;

wherein said second electrical-conduction paths are set symmetrically with respect to said first axis of rotation.

12. A resonant accelerometer, comprising:

a detection structure configured to detect a component of external linear acceleration directed along a vertical axis, the detection structure including;

a substrate;

elastic anchorage elements;

an inertial mass having first and second windows and a first outer lateral surface, said second window facing outside of said inertial mass, the inertial mass being anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along the vertical axis that is transverse with respect to said plane;

first and second elastic supporting elements; and

a first resonator element positioned in the first window and a second resonator element positioned in the second window, said second resonator element having a second outer lateral surface flush with and aligned along said horizontal axis with respect to said first outer lateral surface of said inertial mass, said first and second resonator elements being mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element, respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass.

13. The accelerometer according to claim 12, further comprising a reading and driving circuit electrically coupled to said detection structure.

14. The accelerometer according to claim 12 wherein the inertial mass has a third window, the substrate including:

a central anchor, positioned in the third window, said elastic anchorage elements coupling to said inertial mass to the central anchor in the third window, and extending along said first axis of rotation, said inertial mass having a distribution of mass asymmetrical with respect to said first axis of rotation and being constrained eccentrically to said substrate.

15. The accelerometer according to claim 12 wherein said second resonator element is set in an external lateral position with respect to an overall dimension of said inertial mass in said plane.

16. The accelerometer according to claim 12 wherein said first resonator element and said second resonator element are positioned symmetrically with respect to said first axis of rotation, said second axis of rotation and said third axis of rotation being positioned at an equal distance from said first axis of rotation.

17. An electronic apparatus, comprising:

a control unit; and

a resonant accelerometer coupled to the control unit, the accelerometer including;

a detection structure configured to detect a component of external linear acceleration directed along a vertical axis, the detection structure including;

a substrate;

elastic anchorage elements;

an inertial mass having first and second windows and a first outer lateral surface, the inertial mass being anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along the vertical axis that is transverse with respect to said plane;

first and second elastic supporting elements; and

a first resonator element positioned in the first window and a second resonator element positioned in the second window, said second resonator element having a second outer lateral surface aligned with the first outer lateral surface of said inertial mass, said first and second resonator elements being mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element, respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass;

a reading circuit coupled to the accelerometer; and

a driving circuit coupled to the accelerometer.

18. The apparatus according to claim 17 wherein the inertial mass has a third window, the substrate including:

a central anchor, positioned in the third window, said elastic anchorage elements coupling to said inertial mass to the central anchor in the third window, and extending along said first axis of rotation, said inertial mass having a distribution of mass asymmetrical with respect to said first axis of rotation and being constrained eccentrically to said substrate.

19. The apparatus according to claim 17 wherein

said second window faces outside of said inertial mass.

20. The apparatus according to claim 17 wherein said first resonator element and said second resonator element are positioned symmetrically with respect to said first axis of rotation, said second axis of rotation and said third axis of rotation being positioned at an equal distance from said first axis of rotation.

21. A resonant accelerometer, comprising:

a substrate;

a mass overlying the substrate, the mass being configured to rotate about a first axis, the mass having;

a first end;

a second end opposite to the first end;

a first opening extending through the first end; and

a second opening;

a first resonator element elastically coupled to the mass and positioned in the first opening, the first resonator element being configured to rotate about a second axis;

a second resonator element elastically coupled to the mass and positioned in the second opening, the second resonator element being configured to rotate about a third axis.

22. The resonator accelerometer of claim 21, further comprising a pillar on the substrate, the pillar being positioned between the first and second resonator elements, the mass being elastically coupled to the pillar.

23. The resonator accelerometer of claim 21, wherein the second opening is enclosed within the mass.

24. The resonator accelerometer of claim 21, wherein the second opening extends through the second end.

25. The resonator accelerometer of claim 21, further comprising:

an electrode on the substrate and overlapping the first resonator;

an electric track formed on the substrate and coupled to the electrode, the electric track aligned with the first opening.