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Inspection apparatus, inspection system, inspection method of semiconductor devices, and manufacturing method of inspected semiconductor devices

  • US 9,379,029 B2
  • Filed: 07/18/2012
  • Issued: 06/28/2016
  • Est. Priority Date: 07/18/2012
  • Status: Active Grant
First Claim
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1. An inspection apparatus configured to inspect output signals of semiconductor devices, the inspection apparatus comprising:

  • a monitor line;

    a monitor device configured to sense a signal on the monitor line;

    a plurality of inspection circuits connected to the monitor line; and

    a selector device,wherein each inspection circuit comprises;

    a semiconductor device support on which a semiconductor device is to be set, the semiconductor device support comprising a signal terminal to which a signal is input from the semiconductor device set on the semiconductor support;

    a first resistor connected between the signal terminal and the monitor line;

    a selector terminal; and

    a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side, andthe selector device is configured to perform an operation to apply a first potential on a first selector terminal of the plurality of the selector terminals and apply a second potential lower than the first potential on other selector terminals and an operation to apply the first potential on a second selector terminal of the plurality of the selector terminals and apply the second potential on other selector terminals.

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