Inspection apparatus, inspection system, inspection method of semiconductor devices, and manufacturing method of inspected semiconductor devices
First Claim
1. An inspection apparatus configured to inspect output signals of semiconductor devices, the inspection apparatus comprising:
- a monitor line;
a monitor device configured to sense a signal on the monitor line;
a plurality of inspection circuits connected to the monitor line; and
a selector device,wherein each inspection circuit comprises;
a semiconductor device support on which a semiconductor device is to be set, the semiconductor device support comprising a signal terminal to which a signal is input from the semiconductor device set on the semiconductor support;
a first resistor connected between the signal terminal and the monitor line;
a selector terminal; and
a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side, andthe selector device is configured to perform an operation to apply a first potential on a first selector terminal of the plurality of the selector terminals and apply a second potential lower than the first potential on other selector terminals and an operation to apply the first potential on a second selector terminal of the plurality of the selector terminals and apply the second potential on other selector terminals.
2 Assignments
0 Petitions
Accused Products
Abstract
An inspection apparatus for inspecting output signal of a semiconductor device is provided with a monitor device configured to sense a signal on the monitor line and a plurality of inspection circuits connected to the monitor line. Each inspection circuit is provided with a semiconductor device support allowing a semiconductor device to be set thereon and including a signal terminal to which a signal is input from the set semiconductor device, a first resistor connected between the signal terminal and the monitor line, a selector terminal, and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side.
-
Citations
10 Claims
-
1. An inspection apparatus configured to inspect output signals of semiconductor devices, the inspection apparatus comprising:
-
a monitor line; a monitor device configured to sense a signal on the monitor line; a plurality of inspection circuits connected to the monitor line; and a selector device, wherein each inspection circuit comprises; a semiconductor device support on which a semiconductor device is to be set, the semiconductor device support comprising a signal terminal to which a signal is input from the semiconductor device set on the semiconductor support; a first resistor connected between the signal terminal and the monitor line; a selector terminal; and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side, and the selector device is configured to perform an operation to apply a first potential on a first selector terminal of the plurality of the selector terminals and apply a second potential lower than the first potential on other selector terminals and an operation to apply the first potential on a second selector terminal of the plurality of the selector terminals and apply the second potential on other selector terminals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method for inspecting output signals of semiconductor devices using an inspection apparatus,
the inspection apparatus comprising: -
a monitor line; and a plurality of inspection circuits connected to the monitor line, wherein each inspection circuit comprises; a semiconductor device support on which a semiconductor device is to be set, the semiconductor device support comprising a signal terminal to which a signal is input from the semiconductor device set on the semiconductor support; a first resistor connected between the signal terminal and the monitor line; a selector terminal; and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side, the method comprising; setting a semiconductor device on each semiconductor device support; sensing a signal on the monitor line in a state where a first potential is applied on a first selector terminal among the plurality of the selector terminals and a second potential lower than the first potential is applied on other selector terminals; and sensing the signal on the monitor line in a state where the first potential is applied on a second selector terminal among the plurality of the selector terminals and the second potential is applied on other selector terminals.
-
-
10. A method for manufacturing inspected semiconductor devices, comprising
forming structures of semiconductor devices; - and
inspecting the formed semiconductor devices, wherein an inspection apparatus used in the inspection comprises; a monitor line, and a plurality of inspection circuits connected to the monitor line, each inspection circuit comprises; a semiconductor device support on which a semiconductor device is to be set, the semiconductor device support comprising a signal terminal to which a signal is input from the semiconductor device set on the semiconductor support; a first resistor connected between the signal terminal and the monitor line; a selector terminal; and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side, the inspection comprising; setting a semiconductor device on each semiconductor device support; sensing a signal on the monitor line in a state where a first potential is applied on a first selector terminal among the plurality of the selector terminals and a second potential lower than the first potential is applied on other selector terminals; and sensing the signal on the monitor line in a state where the first potential is applied on a second selector terminal among the plurality of the selector terminals and the second potential is applied on other selector terminals.
- and
Specification