Piezoelectric energy harvesting device and method of fabricating the same

• US 9,379,309 B2
• Filed: 06/03/2013
• Issued: 06/28/2016
• Est. Priority Date: 12/06/2012
• Status: Expired due to Fees

• Current Assignee: Electronics and Telecommunications Research Institute
• Original Assignee: Electronics and Telecommunications Research Institute
• Inventors: Lee, Sang Kyun, Yang, Yil Suk, Kwon, Jong-Kee
• Primary Examiner(s): Dougherty, Thomas
• Assistant Examiner(s): Addison, Karen B
• Application Number:
  US13/908,086
• Publication Number:
  US 20140159542A1
• Time in Patent Office: 1,121 Days
• Field of Search: 310/311, 310/324, 310/330, 310/331, 310/332, 310/365, 310/339, 29/253.5
• US Class Current: 1/1
• CPC Class Codes: H10N 30/072 by laminating or bonding of piezoelectric or electrostrictive bodies
• CPC Class Codes: H10N 30/085 by machining
• CPC Class Codes: H10N 30/088 by cutting or dicing
• CPC Class Codes: H10N 30/092 Forming composite materials
• CPC Class Codes: H10N 30/098 Forming organic materials
• CPC Class Codes: H10N 30/30 with mechanical input and electrical output, e.g. functioning as generators or sensors
• CPC Class Codes: H10N 30/852 Composite materials, e.g. having 1-3 or 2-2 type connectivity
• CPC Class Codes: H10N 30/853 Ceramic compositions
• CPC Class Codes: H10N 30/8554 Lead zirconium titanate based
• CPC Class Codes: H10N 30/875 Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A flexible piezoelectric energy harvesting device includes a first flexible electrode substrate, a piezoelectric layer disposed on the first flexible electrode substrate, and a second flexible electrode substrate disposed on the piezoelectric layer. The piezoelectric layer may include a plurality of first piezoelectric lines spaced apart from each other in one direction and a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines.

Claims

1. A flexible piezoelectric energy harvesting device comprising:

a first flexible electrode substrate;

a piezoelectric layer disposed on the first flexible electrode substrate, the piezoelectric layer including a plurality of first piezoelectric lines spaced apart from each other in one direction and a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines; and

a second flexible electrode substrate disposed on the piezoelectric layer.

2. The flexible piezoelectric energy harvesting device of claim 1, wherein the first and second flexible electrode substrates include a conductive material.

3. The flexible piezoelectric energy harvesting device of claim 1, wherein each of the first and second flexible electrode substrates comprises:

an insulating polymer layer; and

an electrode pattern disposed on a surface of the insulating polymer layer which is adjacent to the piezoelectric layer.

4. The flexible piezoelectric energy harvesting device of claim 3, wherein the electrode pattern has an interdigitated electrode (IDE) structure.

5. The flexible piezoelectric energy harvesting device of claim 1, wherein the first piezoelectric lines include a piezoelectric ceramic material or a single-crystalline material.

6. The flexible piezoelectric energy harvesting device of claim 5, wherein the first piezoelectric lines include the piezoelectric ceramic material;

and

wherein the piezoelectric ceramic material includes lead zirconate titanate (PZT) or lead-free ceramic materials.

7. The flexible piezoelectric energy harvesting device of claim 5, wherein the first piezoelectric lines include the single-crystalline material;

and

wherein the single-crystalline material includes lead magnesium niobate-lead titanate (PMN-PT), lead magnesium niobate-lead zirconate titanate (PMN-PZT), lead indium niobate-lead titanate (PIN-PT), or lead zirconate niobate-lead titanate (PZN-PT).

8. The flexible piezoelectric energy harvesting device of claim 1, wherein the second piezoelectric lines include a piezoelectric polymer material;

and

wherein the piezoelectric polymer material includes a polyvinylidene difluoride (PVDF) polymer-based piezoelectric material, or a polyvinylidene difluoride-trifluoroethylene (PVDF-TrFE) polymer-based piezoelectric material.

9. The flexible piezoelectric energy harvesting device of claim 1, wherein each of the first and second piezoelectric lines has a quadrilateral cross section in another direction crossing the one direction.

10. A flexible piezoelectric energy harvesting device comprising:

a first flexible electrode substrate;

a piezoelectric layer disposed on the first flexible electrode substrate, the piezoelectric layer including a plurality of piezoelectric islands spaced apart from each other and regularly arranged and a piezoelectric net pattern filling spaces between the piezoelectric islands; and

a second flexible electrode substrate disposed on the piezoelectric layer,

wherein the piezoelectric net pattern includes a piezoelectric material that comes in contact with the first and second flexible electrodes, the piezoelectric material extending from the first flexible electrode to the second flexible electrode.