Resonator with a staggered electrode configuration

• US 9,379,686 B2
• Filed: 03/04/2014
• Issued: 06/28/2016
• Est. Priority Date: 03/04/2014
• Status: Active Grant

• Current Assignee: Qualcomm, Inc.
• Original Assignee: Qualcomm, Inc.
• Inventors: Wilcox, Rick Allen, Yun, Changhan Hobie, Zuo, Chengjie, Kim, Jonghae, Velez, Mario Francisco, Kim, Daeik Daniel
• Primary Examiner(s): Summons, Barbara
• Application Number:
  US14/196,355
• Publication Number:
  US 20150256143A1
• Time in Patent Office: 847 Days
• Field of Search: 333186-189, 333/197, 333/200
• US Class Current: 1/1
• CPC Class Codes: H03H 2003/027 the resonators or networks being of the microelectro-mechanical [MEMS] type
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/02133 of stress
• CPC Class Codes: H03H 9/02228 Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
• CPC Class Codes: H03H 9/02244 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/02448 of temperature influence
• CPC Class Codes: H03H 9/132 characterized by a particular shape
• CPC Class Codes: H03H 9/133 for electromechanical delay lines or filters
• CPC Class Codes: H03H 9/15 Constructional features of resonators consisting of piezoelectric or electrostrictive material H03H9/25 takes precedence
• CPC Class Codes: H03H 9/462 Microelectro-mechanical filters
• CPC Class Codes: H03H 9/54 comprising resonators of piezoelectric or electrostrictive material H03H9/64 takes precedence

Abstract

An integrated circuit device includes a piezoelectric substrate having a first surface and a second surface opposite the first surface. The device also includes a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width. The device further includes a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, and the fourth electrode having a fourth width that is substantially the same as the first width. The first and third electrodes operate as part of a first portion of a microelectromechanical systems (MEMS) resonator, and the second and fourth electrodes operate as part of a second portion of the MEMS resonator.

Claims

1. An integrated circuit device, comprising:

a piezoelectric substrate having a first surface and a second surface opposite the first surface;

a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width different from the first width; and

a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, the fourth electrode having a fourth width that is substantially the same as the first width,

the first electrode and the third electrode being aligned on a same side of the first surface and the second surface of the piezoelectric substrate and arranged to operate as a first portion of a microelectromechanical systems (MEMS) resonator, in which one of the first electrode and the third electrode is an input electrode and the other electrode is either an output electrode or a ground electrode, and the second electrode and the fourth electrode being aligned on a same side of the first surface and the second surface of the piezoelectric substrate and arranged to operate as a second portion of the MEMS resonator, in which one of the second electrode and the fourth electrode is an input electrode and the other electrode is either an output electrode or a ground electrode.

2. The integrated circuit device of claim 1, in which the first electrode and the second electrode are the input electrode and the output electrode, respectively, of the MEMS resonator, and the third electrode and the fourth electrode are the output electrode and the input electrode of the MEMS resonator.

3. The integrated circuit device of claim 1 integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

4. An integrated circuit device, comprising:

means for supporting having a first surface and a second surface opposite the first surface;

a first electrode and a second electrode on the first surface of the supporting means, the first electrode having a first width and the second electrode having a second width different from the first width; and

a third electrode and a fourth electrode on the second surface of the supporting means, the third electrode having a third width that is substantially the same as the second width, the fourth electrode having a fourth width that is substantially the same as the first width,

the first electrode and the third electrode being aligned on a same side of the first surface and the second surface of the supporting means and arranged to operate as a first portion of a microelectromechanical systems (MEMS) resonator, in which one of the first electrode and the third electrode is an input electrode and the other electrode is either an output electrode or a ground electrode, and the second electrode and the fourth electrode being aligned on a same side of the first surface and the second surface of the supporting means and arranged to operate as part of a second portion of the MEMS resonator, in which one of the second electrode and the fourth electrode is an input electrode and the other electrode is either an output electrode or a ground electrode.

5. The integrated circuit device of claim 4, in which the first electrode and the second electrode are the input electrode and the output electrode, respectively, of the MEMS resonator, and the third electrode and the fourth electrode are the output electrode and the input electrode of the MEMS resonator.

6. The integrated circuit device of claim 4 integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.