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Optical measurement system with polarization compensation, and corresponding method

  • US 9,383,272 B2
  • Filed: 06/04/2013
  • Issued: 07/05/2016
  • Est. Priority Date: 06/05/2012
  • Status: Active Grant
First Claim
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1. A method for adjustment of an optical measurement apparatus, comprising:

  • providing an optical measurement apparatus, which comprises, as optical elements;

    a beam splitter;

    a first photo sensor, exposed by a first partial beam from the beam splitter;

    an optical filter;

    a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter,wherein the angularity and relative position between multiple optical elements is arranged to be adjustable and wherein the first and second photo sensors are configured to generate different output signals;

    providing a device for generating a difference signal from the signals of both photo sensors;

    providing a light source for generating light with periodically varying polarization;

    irradiating the light into the beam splitter, so that both photo sensors are exposed by each respective partial beam;

    generating a difference signal of the output signals of the photo sensors;

    varying the position and/or angularity of at least one optical element, and measuring the difference signal; and

    determining the combination of angularity/position of the elements which achieves a minimum difference signal.

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