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Method for orientating a grid mirror and grid mirror device

  • US 9,383,575 B2
  • Filed: 02/26/2013
  • Issued: 07/05/2016
  • Est. Priority Date: 04/24/2012
  • Status: Active Grant
First Claim
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1. A method for aligning a light beam, comprising:

  • deflecting the light beam by way of a first mirror element and a second mirror element, the first mirror element and the second mirror element being aligned with one another in such a way that one of;

    a reflection of the first mirror element is incident onto the second mirror element, anda reflection of the second mirror element is incident onto the first mirror element,wherein the first mirror element is displaced through a first deflection angle around a first rotation axis, wherein the second mirror element is displaced through a second deflection angle around a second rotation axis inclined with respect to the first rotation axis;

    during a displacement of the first mirror element through the first deflection angle around the first rotation axis and of the second mirror element through the second deflection angle around the second rotation axis, additionally displacing the second mirror element through a third deflection angle around a third rotation axis that is aligned with an inclination with respect to the second rotation axis; and

    during a displacement of the second mirror element additionally through the third deflection angle around the third rotation axis, at least one of;

    displacing the first mirror element around a first mirror normal line of the first mirror element through a first compensation angle defined for the third deflection angle, anddisplacing the second mirror element around a second mirror normal line of the second mirror element through a second compensation angle defined for the third deflection angle.

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