Method and apparatus for depositing LED organic film

• US 9,385,322 B2
• Filed: 04/27/2011
• Issued: 07/05/2016
• Est. Priority Date: 11/21/2005
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Bulovic, Vladimir, Baldo, Marc A., Schmidt, Martin A., Gassend, Valerie, Chen, Jianglong
• Primary Examiner(s): Gambetta, Kelly M
• Application Number:
  US13/095,619
• Publication Number:
  US 20110262624A1
• Time in Patent Office: 1,896 Days
• Field of Search: 427/255.6, 427/248.1
• US Class Current: 1/1
• CPC Class Codes: B05D 1/12 Applying particulate materials B05D1/06, B05D1/10 take precedence
• CPC Class Codes: C23C 16/04 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: C23C 16/042 using masks
• CPC Class Codes: C23C 16/448 characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/4483 using a porous body
• CPC Class Codes: C23C 16/4485 by evaporation without using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45568 Porous nozzles
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.

Claims

1. A method for depositing a layer of substantially solvent-free organic material on a substrate, comprising:

heating the organic material to form a plurality of suspended organic particles;

delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores for receiving the suspended organic particles;

processing the suspended organic particles through the plurality of micro-pores to substantially block a portion of the suspended organic particles; and

energizing the discharge nozzle to pulsatingly eject the suspended organic particles from the plurality of micro-pores onto the substrate.

3. The method of claim 1, wherein the step of energizing the discharge nozzle further comprises heating the discharge nozzle.

4. The method of claim 1, wherein the step of delivering the suspended organic particles further comprises transporting the suspended organic particles with a carrier gas.

5. The method of claim 4, wherein the carrier gas is inert.

6. The method of claim 1, wherein the step of energizing the discharge nozzle further comprises mechanically vibrating the discharge nozzle.

7. The method of claim 1, wherein processing the suspended organic material further comprises processing the suspended organic material through micro-pores having a porous medium to separate a quantity of organic particles from a quantity of solvent.

8. The method of claim 1, wherein processing the suspended organic material further comprises separating an organic material from a solvent.

9. The method of claim 1, further comprising deflecting thermal radiation from the discharge nozzle.

2. The method of claim further comprising positioning the discharge nozzle proximal to the substrate.

10. A method for depositing substantially solvent-free organic film on a substrate, the method comprising:

transporting an OLED solution from a reservoir to a discharge nozzle, the OLED solution having OLED particles in a solvent;

receiving the OLED solution at a plurality of micro-pores of the discharge nozzle, each micro-pore containing a porous medium;

separating a quantity of OLED particles from the solvent at the porous medium of the micro-pores;

removing the solvent from the discharge nozzle; and

dislodging the quantity of organic particles from the discharge nozzle onto a substrate.

11. The method of claim 10, wherein transporting an OLED solution from a reservoir to a discharge nozzle further comprises heating the OLED solution.

12. The method of claim 10, wherein the OLED solution comprises a quantity of OLED particles dissolved in solvent.

13. The method of claim 10, further comprising heating the discharge nozzle to dislodge the quantity of organic particles.