Acoustic resonator having guard ring

• US 9,385,684 B2
• Filed: 10/23/2012
• Issued: 07/05/2016
• Est. Priority Date: 10/23/2012
• Status: Active Grant

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Inventors: Nikkel, Phil, Feng, Chris, Burak, Dariusz, Choy, John
• Primary Examiner(s): Lee, Benny
• Assistant Examiner(s): SALAZAR JR, JORGE L
• Application Number:
  US13/658,024
• Publication Number:
  US 20140111288A1
• Time in Patent Office: 1,351 Days
• Field of Search: 333/133, 333186-191, 310/324, 310/365, 310/312
• US Class Current: 1/1
• CPC Class Codes: H03H 9/02118 of lateral leakage between adjacent resonators
• CPC Class Codes: H03H 9/02157 Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
• CPC Class Codes: H03H 9/173 Air-gaps

Abstract

A bulk acoustic wave (BAW) resonator structure comprises a first electrode disposed over a substrate, a piezoelectric layer disposed over the first electrode, a second electrode disposed over the first piezoelectric layer, and a guard ring structure formed around a perimeter of an active region corresponding to an overlap of the first electrode, the first piezoelectric layer, and the second electrode.

Claims

1. A bulk acoustic wave (BAW) resonator structure, comprising:

a bottom electrode disposed over a substrate;

a piezoelectric layer disposed over the bottom electrode;

a top electrode disposed over the piezoelectric layer;

a guard ring disposed around a perimeter of an active region corresponding to an overlap of the top electrode, the piezoelectric layer, and the bottom electrode; and

a planarization layer disposed over the piezoelectric layer and between the top electrode and the guard ring.

2. The BAW resonator structure of claim 1, wherein the guard ring comprises an electrically conductive material disposed over the piezoelectric layer adjacent to the top electrode.

3. The BAW resonator structure of claim 2, wherein the bottom electrode is electrically connected to ground, the top electrode is electrically connected to a time-varying electrical input signal, and the electrically conductive material of the guard ring is electrically connected to ground.

4. The BAW resonator structure of claim 2, wherein the electrically conductive material of the guard ring is electrically connected to the bottom electrode.

5. The BAW resonator structure of claim 2, wherein the electrically conductive material of the guard ring is electrically floated.

6. The BAW resonator structure of claim 2, wherein the electrically conductive material is electrically connected to the top electrode.

7. The BAW resonator structure of claim 1, wherein the planarization layer comprises non-etchable borosilicate glass.

8. The BAW resonator structure of claim 1, wherein the planarization layer comprises a first layer having a first acoustic impedance, and a second layer disposed over the first layer and having a second acoustic impedance lower than the first acoustic impedance.

9. The BAW resonator structure of claim 1, wherein the top electrode comprises a first electrically conductive material having with a first thickness, and the guard ring comprises an electrically conductive material disposed over the piezoelectric layer with a second thickness greater than the first thickness.

10. The BAW resonator structure of claim 1, wherein the top electrode comprises a first electrically conductive material having a first acoustic velocity, and the guard ring comprises a second electrically conductive material disposed over the piezoelectric layer and having a second acoustic velocity lower than the first acoustic velocity.

11. The BAW resonator structure of claim 10, wherein the first electrically conductive material is molybdenum and the second electrically conductive material is tungsten.

12. The BAW resonator structure of claim 1, wherein the guard ring is a first guard ring, which is disposed over a first side of the piezoelectric layer around a perimeter of the top electrode, and the BAW resonator structure further comprises:

a second guard ring disposed beneath a second side of the piezoelectric layer around a perimeter of the bottom electrode.

13. The BAW resonator structure of claim 12, wherein the bottom and top electrodes have substantially aligned edges, and the first and second guard rings have substantially aligned edges.

14. The BAW resonator structure of claim 12, wherein the second guard ring overlaps the bottom electrode.

15. The BAW resonator structure of claim 12, wherein the first guard ring is electrically connected to the top electrode and the second guard ring is electrically connected to the bottom electrode.

16. The BAW resonator structure of claim 12, wherein the first guard ring comprises molybdenum and the second guard ring comprises tungsten.

17. The BAW resonator structure of claim 1, further comprising a cavity disposed in the substrate within the active region, wherein the bottom electrode is suspended over the cavity.

18. The BAW resonator structure of claim 1, wherein the guard ring comprises a dielectric material or a composite of metal and dielectric materials.

19. The BAW resonator structure of claim 1, wherein the guard ring is configured to reduce a cutoff frequency in a region around the perimeter of the active region.

20. A bulk acoustic wave (BAW) resonator structure, comprising:

a bottom electrode disposed over a substrate;

a piezoelectric layer disposed over the bottom electrode;

a top electrode disposed over the piezoelectric layer, the top electrode comprising

a first electrically conductive material having with a first thickness;

a guard ring disposed around a perimeter of an active region corresponding to an overlap of the bottom electrode, the piezoelectric layer, and the top electrode, the guard ring comprising an electrically conductive material disposed over the piezoelectric layer with a second thickness greater than the first thickness, wherein the guard ring comprises a composite of metal and dielectric materials.

21. A bulk acoustic wave (BAW) resonator structure, comprising:

a bottom electrode disposed over a substrate, and electrically connected to ground;

a piezoelectric layer disposed over the bottom electrode;

a top electrode disposed over the piezoelectric layer, the top electrode comprising a first electrically conductive material having a first thickness, and electrically configured to receive a time-varying input signal;

a guard ring disposed over the piezoelectric layer adjacent to the top electrode, and around a perimeter of an active region corresponding to an overlap of the bottom electrode, the piezoelectric layer, and the top electrode, the guard ring comprising an electrically conductive material electrically connected to ground, and disposed over the piezoelectric layer with a second thickness greater than the first thickness.

22. The BAW resonator structure of claim 21, further comprising a cavity disposed in the substrate within the active region, wherein the bottom electrode is suspended over the cavity.

23. The BAW resonator structure of claim 21, wherein the guard ring comprises a composite of metal and dielectric materials.

24. The BAW resonator structure of claim 21, wherein the electrically conductive material of the guard ring is electrically connected to the bottom electrode.

25. The BAW resonator structure of claim 21, wherein the guard ring is a first guard ring, which is disposed over a first side of the piezoelectric layer around a perimeter of the top electrode, and the BAW resonator structure further comprises:

a second guard ring disposed beneath a second side of the piezoelectric layer around a perimeter of the bottom electrode.

26. The BAW resonator structure of claim 25, wherein the first guard ring comprises molybdenum and the second guard ring comprises tungsten.

27. The BAW resonator structure of claim 25, wherein the bottom and top electrodes have substantially aligned edges, and the first and second guard rings have substantially aligned edges.

28. The BAW resonator structure of claim 25, wherein the second guard ring overlaps the bottom electrode.

29. The BAW resonator structure of claim 25, wherein the first guard ring is electrically connected to the top electrode and the second guard ring is electrically connected to the bottom electrode.

30. A bulk acoustic wave (BAW) resonator structure, comprising:

a bottom electrode disposed over a substrate;

a piezoelectric layer disposed over the bottom electrode;

a top electrode disposed over the piezoelectric layer, the top electrode comprising a first electrically conductive material having a first thickness;

a first guard ring disposed over a first side of the piezoelectric layer around a perimeter of the top electrode, and around a perimeter of an active region corresponding to an overlap of the bottom electrode, the piezoelectric layer, and the top electrode, the first guard ring comprising an electrically conductive material disposed over the piezoelectric layer with a second thickness greater than the first thickness; and

a second guard ring disposed beneath a second side of the piezoelectric layer around a perimeter of the bottom electrode, wherein the first and top electrodes have substantially aligned edges, and the first and second guard rings have substantially aligned edges.

31. The BAW resonator structure of claim 30, wherein the second guard ring overlaps the bottom electrode.

32. The BAW resonator structure of claim 30, wherein the first guard ring is electrically connected to the top electrode and the second guard ring is electrically connected to the bottom electrode.

33. The BAW resonator structure of claim 30, wherein the first guard ring comprises molybdenum and the second guard ring comprises tungsten.

34. A bulk acoustic wave (BAW) resonator structure, comprising:

a bottom electrode disposed over a substrate;

a piezoelectric layer disposed over the bottom electrode;

a top electrode disposed over the piezoelectric layer, the top electrode comprising a first electrically conductive material having a first acoustic velocity;

a guard ring disposed around a perimeter of an active region corresponding to an overlap of the bottom electrode, the piezoelectric layer, and the top electrode, the guard ring comprising a second electrically conductive material disposed over the piezoelectric layer and having a second acoustic velocity lower than the first acoustic velocity.

35. The BAW resonator structure of claim 34, wherein the bottom electrode is electrically connected to ground, the top electrode is electrically connected to a time-varying electrical input signal, and the second electrically conductive material is electrically connected to ground.

36. The BAW resonator structure of claim 34, wherein the second electrically conductive material of the guard ring is electrically connected to the bottom electrode.

37. The BAW resonator structure of claim 34, wherein the second electrically conductive material of the guard ring is electrically floated.

38. The BAW resonator structure of claim 34, wherein the guard ring is a first guard ring, which is disposed over a first side of the piezoelectric layer around a perimeter of the top electrode, and the BAW resonator structure further comprises:

a second guard ring disposed beneath a second side of the piezoelectric layer around a perimeter of the bottom electrode.

39. The BAW resonator structure of claim 38, wherein the bottom and top electrodes have substantially aligned edges, and the first and second guard rings have substantially aligned edges.

40. The BAW resonator structure of claim 38, wherein the second guard ring overlaps the bottom electrode.

41. The BAW resonator structure of claim 38, wherein the first guard ring is electrically connected to the top electrode and the second guard ring is electrically connected to the bottom electrode.

42. The BAW resonator structure of claim 38, wherein the first guard ring comprises molybdenum and the second guard ring comprises tungsten.

43. The BAW resonator structure of claim 38, further comprising a cavity disposed in the substrate within the active region, wherein the bottom electrode is suspended over the cavity.

44. The BAW resonator structure of claim 38, wherein the guard ring comprises a composite of metal and dielectric materials.

45. The BAW resonator structure of claim 34, wherein the guard ring is disposed over the piezoelectric layer adjacent to the top electrode.