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MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer

  • US 9,391,588 B2
  • Filed: 09/19/2013
  • Issued: 07/12/2016
  • Est. Priority Date: 08/31/2007
  • Status: Active Grant
First Claim
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1. A micro-electrical-mechanical system (MEMS) vibrating structure adapted to predominantly vibrate in a longitudinal mode of vibration and comprising:

  • a carrier substrate;

    a first anchor on a first surface of the carrier substrate;

    a second anchor on the first surface of the carrier substrate;

    a single-crystal piezoelectric body suspended between the first anchor and the second anchor and including a first surface parallel to and facing the carrier substrate and a second surface opposite the first surface, the single-crystal piezoelectric body including a uniform crystalline orientation defined by a first Euler angle (φ

    ), a second Euler angle (θ

    ), and a third Euler angle (ψ

    ); and

    only one conductive layer on the second surface of the single-crystal piezoelectric body, the conductive layer comprising a first conductive section over the first anchor and a portion of the single-crystal piezoelectric body and a second conductive section over the second anchor and a portion of the single-crystal piezoelectric body.

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