MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
First Claim
1. A micro-electrical-mechanical system (MEMS) vibrating structure adapted to predominantly vibrate in a longitudinal mode of vibration and comprising:
- a carrier substrate;
a first anchor on a first surface of the carrier substrate;
a second anchor on the first surface of the carrier substrate;
a single-crystal piezoelectric body suspended between the first anchor and the second anchor and including a first surface parallel to and facing the carrier substrate and a second surface opposite the first surface, the single-crystal piezoelectric body including a uniform crystalline orientation defined by a first Euler angle (φ
), a second Euler angle (θ
), and a third Euler angle (ψ
); and
only one conductive layer on the second surface of the single-crystal piezoelectric body, the conductive layer comprising a first conductive section over the first anchor and a portion of the single-crystal piezoelectric body and a second conductive section over the second anchor and a portion of the single-crystal piezoelectric body.
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Accused Products
Abstract
A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.
39 Citations
32 Claims
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1. A micro-electrical-mechanical system (MEMS) vibrating structure adapted to predominantly vibrate in a longitudinal mode of vibration and comprising:
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a carrier substrate; a first anchor on a first surface of the carrier substrate; a second anchor on the first surface of the carrier substrate; a single-crystal piezoelectric body suspended between the first anchor and the second anchor and including a first surface parallel to and facing the carrier substrate and a second surface opposite the first surface, the single-crystal piezoelectric body including a uniform crystalline orientation defined by a first Euler angle (φ
), a second Euler angle (θ
), and a third Euler angle (ψ
); andonly one conductive layer on the second surface of the single-crystal piezoelectric body, the conductive layer comprising a first conductive section over the first anchor and a portion of the single-crystal piezoelectric body and a second conductive section over the second anchor and a portion of the single-crystal piezoelectric body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A micro-electrical-mechanical system (MEMS) vibrating structure adapted to predominantly vibrate in a shear-horizontal mode of vibration and comprising:
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a carrier substrate; a first anchor on a first surface of the carrier substrate; a second anchor on the first surface of the carrier substrate; a single-crystal piezoelectric body suspended between the first anchor and the second anchor and including a first surface parallel to and facing the carrier substrate and a second surface opposite the first surface, the single-crystal piezoelectric body including a uniform crystalline orientation defined by a first Euler angle (φ
), a second Euler angle (θ
), and a third Euler angle (ψ
); andonly one conductive layer on the second surface of the single-crystal piezoelectric body, the conductive layer comprising a first conductive section over the first anchor and a portion of the single-crystal piezoelectric body and a second conductive section over the second anchor and a portion of the single-crystal piezoelectric body. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification