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Micromachined gyroscope including a guided mass system

  • US 9,395,183 B2
  • Filed: 08/28/2014
  • Issued: 07/19/2016
  • Est. Priority Date: 09/16/2011
  • Status: Active Grant
First Claim
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1. A gyroscope comprising;

  • a substrate;

    a guided mass system, the guided mass system comprising at least one proof-mass and at least one guiding arm;

    wherein the proof-mass and the guiding arm are disposed in a plane parallel to the substrate;

    the at least one proof-mass being coupled to the at least one guiding arm;

    the at least one guiding arm being coupled to the substrate through a coupling comprising at least one flexible member;

    wherein the proof-mass vibrates in a first direction in the plane and the guiding arm rotates in the plane;

    wherein in response to angular velocity about a first input axis, an end of the guiding arm is able to rotate out of the plane and the proof-mass is able to rotate out of the plane;

    an actuator for rotating the guiding arm in the plane; and

    a transducer for generating an output in response to the angular velocity of the at least one proof-mass.

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