Systems and methods for controlling a plasma edge region

• US 9,396,908 B2
• Filed: 12/02/2011
• Issued: 07/19/2016
• Est. Priority Date: 11/22/2011
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Marakhtanov, Alexei, Dhindsa, Rajinder
• Primary Examiner(s): Lund, Jeffrie R
• Assistant Examiner(s): Yu, Yuechuan
• Application Number:
  US13/310,673
• Publication Number:
  US 20130126513A1
• Time in Patent Office: 1,691 Days
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32577 Electrical connecting means
• CPC Class Codes: H05B 7/18 Heating by arc discharge

Abstract

Systems and methods for controlling a plasma edge region are described. One of the systems includes a top electrode and a bottom electrode. The system also includes an upper electrode extension and a lower electrode extension. At least a portion of the plasma edge region is formed between the upper electrode extension and the lower electrode extension. The system includes a circuit to control a radio frequency signal at the upper electrode extension.

Claims

1. A system comprising:

a top electrode and a bottom electrode for generating an electric field;

one or more upper insulating rings surrounding a portion of the top electrode;

a lower insulating ring surrounding a portion of the bottom electrode;

an upper electrode extension surrounding a portion of the one or more upper insulating rings;

a lower electrode extension surrounding a portion of the lower insulating ring, wherein at least a portion of a plasma center region is formed between the top electrode and the bottom electrode, wherein at least a portion of a plasma edge region is formed between the upper electrode extension, the lower electrode extension, and a C-shroud; and

a control circuit having an inductor, the control circuit being connected to the upper electrode extension for filtering a first radio frequency signal provided to the upper electrode extension, wherein the top electrode is coupled with ground and the upper electrode extension is coupled with a variable capacitor and the inductor, wherein the variable capacitor is coupled in parallel with the inductor, and a controller that is coupled with the control circuit, wherein the controller is configured to adjust a capacitance of the variable capacitor to provide an impedance to the upper electrode extension such that a potential of a top plasma sheath within the plasma edge region is in phase with a potential of a bottom plasma sheath within the plasma edge region.

2. The system of claim 1, wherein the bottom electrode is coupled with a plurality of radio frequency sources via a combiner, the one or more upper insulating rings for insulating the top electrode from the upper electrode extension, and the lower insulating ring for insulating the bottom electrode from the lower electrode extension.

3. The system of claim 1, wherein the potential of the top plasma sheath is in phase with the potential of the bottom plasma sheath to control a density of the plasma edge region.

4. The system of claim 1, wherein the variable capacitor is configured to vary an amplitude of the first radio frequency signal.

5. The system of claim 1, wherein the control circuit includes a plurality of passive filter components.

6. The system of claim 1, wherein the capacitance of the variable capacitor is adjusted to be in a range between 650 picoFarads and 1200 picoFarads.

7. The system of claim 1, wherein the C-shroud is separated from the lower electrode extension via an insulating ring, wherein the C-shroud has a plurality of slots that are aligned parallel to a height of the lower electrode extension and are located outside a region surrounded by a circumference of the lower electrode extension.

8. A system for controlling a plasma edge region, comprising a control circuit for filtering a radio frequency signal to apply to an upper electrode extension, the upper electrode extension other than a top electrode of a plasma chamber, the plasma edge region formed between the upper electrode extension, a lower electrode extension of the plasma chamber, and a C-shroud, the control circuit coupled to the upper electrode extension, and the top Electrode is coupled with ground, the control circuit including an inductor and a variable capacitor,

the inductor coupled in parallel with the variable capacitor, and a controller that is coupled with the control circuit, wherein the controller is configured to adjust a capacitance of the variable capacitor to provide an impedance to the upper electrode extension such that a potential of a top plasma sheath within the plasma edge region is in phase with a potential of a bottom plasma sheath within the plasma edge region.

9. The system of claim 8, wherein the plasma edge region is closer to an edge region within the plasma chamber than a center region of the plasma chamber.

10. The system of claim 8, wherein the potential of the top plasma sheath and the potential of the bottom plasma sheath are in phase to control a density of the plasma edge region.

11. The system of claim 8, wherein the variable capacitor is configured to vary an amplitude of the radio frequency signal.

12. A method comprising:

receiving a coupling with a plasma edge region via an upper electrode extension, the plasma edge region located within a plasma region, the plasma edge region located between an upper electrode extension, a lower electrode extension, and a C-shroud, the plasma region including a plasma center region, the plasma center region formed between a top electrode and a bottom electrode;

filtering a radio frequency signal via a variable capacitor and an inductor, wherein the variable capacitor is coupled in parallel with the inductor, wherein filtering the radio frequency signal includes adjusting a capacitance of the variable capacitor to provide an impedance to the upper electrode extension such that a potential of a top plasma sheath within the plasma edge region is in phase with a potential with a potential of a bottom plasma sheath within the plasma edge region, wherein filtering the radio frequency signal is performed to generate a filtered signal; and

applying the filtered radio frequency signal to the upper electrode extension when the top electrode is coupled with ground.