Method of design-based defect classification and system thereof

• US 9,401,013 B2
• Filed: 01/31/2013
• Issued: 07/26/2016
• Est. Priority Date: 02/03/2012
• Status: Active Grant

• Current Assignee: Applied Materials Israel Limited (Applied Materials Incorporated)
• Original Assignee: Applied Materials Israel Limited (Applied Materials Incorporated)
• Inventors: Goren, Zvi, Geshel, Mark, Rozenman, Efrat
• Primary Examiner(s): Chawan, Sheela C
• Application Number:
  US13/756,462
• Publication Number:
  US 20140212022A1
• Time in Patent Office: 1,272 Days
• Field of Search: 382/100, 382/141, 382/145, 382/149, 700/90, 700/95, 700/110, 700/121, 700/117, 700/108, 700/109, 702/20, 702/59, 702/83, 702/57, 702/58, 716/52, 716/50, 716/51, 356/237.2, 356/237.1, 356/237.3, 348/126, 348/125, 348/128
• US Class Current: 1/1
• CPC Class Codes: G01R 31/26 Testing of individual semiconductor devices testing or measuring during manufacture or treatment H01L22/00; testing of photovoltaic devices H02S50/10
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0004 Industrial image inspection
• CPC Class Codes: G06T 7/0006 using a design-rule based approach
• CPC Class Codes: G06T 7/001 using an image reference approach
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14

Abstract

There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.

Claims

1. A computer-implemented method for classifying defects detected on a production layer of a specimen, the method comprising:

obtaining input data related to the detected defects;

processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof;

sorting processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation specified by the decision algorithm, wherein the at least one classification operation specified by the decision algorithm sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each given classification operation specified by the decision algorithm, excluding the last classification operation in the sequence specified by the decision algorithm, sorts at least part of the processed defects to be processed by one or more of the classification operations following the given classification operation in the sequence specified by the decision algorithm; and

storing at least finally classified defects in a storage medium.

2. The method of claim 1 wherein the defects sorted by a current classification operation to be processed by one or more of the following classification operations are sorted to one or more bins associated with the current classification operation and selected from a group comprising:

bins corresponding to defects non-classified by a current classification operation, and removed from further processing as not matching the classification operations defined by the decision algorithm;

bins corresponding to defects recognized by a current operation as designated to a predefined further classification operation and thus to be processed when such predefined classification operation is executed; and

bins corresponding to defects recognized by the current classification operation as designated to one of the following classification operations and thus to be processed by each next classification operation until further classified.

3. The method of claim 1 wherein the same defect is sorted to more than one bin.

4. The method of claim 1 wherein at least one bin is associated with at least two classification operations.

5. The method of claim 1 wherein the input data comprise design-indicative data.

6. The method of claim 1 wherein at least one classification operation sorts the processed defects based on matching, for each defect, a dataset indicative of data-types and layers numbers attributes of all polygons in a vicinity of the defect to one or more predefined datasets comprising classification-related instructions associated with combinations of data-type and layer number attributes.

7. The method of claim 1 wherein at least one classification operation sorts the processed defects using a combination of design rule check (DRC) analyses with classification by design attributes (CDA).

8. The method of claim 1 wherein an order of classification operations is predefined in accordance with at least one of the following:

a. decreasing a number of defects designated for processing by each next classification operation;

b. increasing an amount of input data sources required for each next classification operation;

c. providing a classification operation requiring a large number of defects to be processed for classification decision before classification operations requiring less defects to be processed for classification decision; and

d. providing a classification operation requiring a large number of defects to be processed for classification decision after classification operations requiring less defects to be processed for classification decision and configured to sort appropriate defects to be gathered for processing by the classification operation requiring a large number of defects to be processed for a classification decision.

9. The method of claim 1 wherein at least two classification operations substantially simultaneously sort the processed defects using design rule check (DRC) analyses, each such classification operation corresponding to a different design rule.

10. The method of claim 1 further comprising calculating, during an inspection scan, design attributes for each of the defects to be processed.

11. The method of claim 10 wherein any of CDA, DRC and library match calculations required for the classification operations are provided during the inspection scan.

12. The method of claim 10 wherein at least one classification operation comprising design-based binning is provided after the inspection scan.

13. An inspection system capable of classifying defects detected on a production layer of a specimen, the inspection system comprising:

a defect data interface configured to obtain defect-indicative data from the at least one inspection tool;

a design data interface configured to obtain design-indicative data from a first memory;

a second memory configured to store finally classified defects; and

a processor operatively coupled to the at least one inspection tool, the first memory, and the second memory, wherein the processor is configured to process the defect-indicative data and the design-indicative data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof;

the processor is further configured to sort processed defects in accordance with predefined bins,

wherein each bin is associated with at least one classification operation specified by the decision algorithm;

wherein the at least one classification operation specified by the decision algorithm sorts at least part of the processed defects to one or more classification bins to yield finally classified defects; and

wherein each given classification operation, excluding the last classification operation in the sequence specified by the decision algorithm, sorts at least part of the processed defects to be processed by one or more of the classification operations following the given classification operation in the sequence specified by the decision algorithm.

14. The system of claim 13 wherein the defects sorted by a current classification operation to be processed by one or more of the following classification operations are sorted to one or more bins associated with the current classification operation and selected from a group comprising:

bins corresponding to defects non-classified by a current classification operation, and removed from the further processing as not matching the classification operations defined by the decision algorithm;

bins corresponding to defects recognized by a current operation as designated to a predefined further classification operation and thus to be processed when such predefined classification operation is executed; and

bins corresponding to defects recognized by the current classification operation as designated to one of the following classification operations and thus to be processed by each next classification operation until further classified.

15. The system of claim 13 further configured to calculate, during a scan of the at least one inspection tool, design attributes for each of the defects to be processed.

16. The system of claim 15 further configured to provide any of CDA, DRC and library match calculations required for the classification operations during the scan of the at least one inspection tool.

17. The system of claim 16 further configured to provide at least one classification operation comprising design-based binning after the scan of the at least one inspection tool.

18. A processor operable in conjunction with an inspection system capable of classifying defects detected on a production layer of a specimen, the processor operatively coupled to a memory accessible by the processor and configured to store finally classified defects, wherein the processor is configured to process defect-indicative data and design-indicative data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof;

the processor is further configured to sort processed defects in accordance with predefined bins;

wherein each bin is associated with at least one classification operation specified by the decision algorithm;

wherein the at least one classification operation specified by the decision algorithm sorts at least part of the processed defects to one or more classification bins to yield finally classified defects; and

wherein each given classification operation, excluding the last classification operation in the sequence specified by the decision algorithm, sorts at least part of the processed defects to be processed by one or more of the classification operations following the given classification operation in the sequence specified by the decision algorithm.

19. The processor of claim 18 wherein the defects sorted by a current classification operation to be processed by one or more of the following classification operations are sorted to one or more bins associated with the current classification operation and selected from a group comprising:

bins corresponding to defects non-classified by a current classification operation, and removed from the further processing as not matching the classification operations defined by the decision algorithm;

bins corresponding to defects recognized by a current operation as designated to a predefined further classification operation and thus to be processed when such predefined classification operation is executed; and

bins corresponding to defects recognized by the current classification operation as designated to one of the following classification operations and thus to be processed by each next classification operation until further classified.

20. The processor of claim 18 further configured to calculate, during an inspection scan, design attributes for each of the defects to be processed.

21. The processor of claim 20 further configured to provide any of CDA, DRC and library match calculations required for the classification operations during the inspection scan.

22. The processor of claim 21 further configured to provide at least one classification operation comprising design-based binning after the inspection scan.