Methods and apparatus for temperature control of devices and mechanical resonating structures
First Claim
Patent Images
1. A device, comprising:
- a substrate;
a piezoelectric mechanical resonating structure suspended above the substrate by first and second anchors and havinga first surface proximate the substrate;
a second surface substantially opposite the first surface and distal the substrate, the piezoelectric mechanical resonating structure comprising a first layer of material adjacent the second surface; and
two free ends substantially opposite each other;
an electrode configured to excite vibrations in the piezoelectric mechanical resonating structure;
a heating element, comprising a metal or a doped semiconductor, directly contacting the mechanical resonating structure and disposed between the substrate and the first layer of material adjacent the second surface, the heating element configured to alter a temperature of the piezoelectric mechanical resonating structure; and
a temperature sensor configured to detect the temperature of the mechanical resonating structure.
2 Assignments
0 Petitions
Accused Products
Abstract
Methods and apparatus for temperature control of devices and mechanical resonating structures are described. A mechanical resonating structure may include a heating element and a temperature sensor. The temperature sensor may sense the temperature of the mechanical resonating structure, and the heating element may be adjusted to provide a desired level of heating. Optionally, additional heating elements and/or temperature sensors may be included.
-
Citations
20 Claims
-
1. A device, comprising:
-
a substrate; a piezoelectric mechanical resonating structure suspended above the substrate by first and second anchors and having a first surface proximate the substrate; a second surface substantially opposite the first surface and distal the substrate, the piezoelectric mechanical resonating structure comprising a first layer of material adjacent the second surface; and two free ends substantially opposite each other; an electrode configured to excite vibrations in the piezoelectric mechanical resonating structure; a heating element, comprising a metal or a doped semiconductor, directly contacting the mechanical resonating structure and disposed between the substrate and the first layer of material adjacent the second surface, the heating element configured to alter a temperature of the piezoelectric mechanical resonating structure; and a temperature sensor configured to detect the temperature of the mechanical resonating structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method of operating a device having a piezoelectric mechanical resonating structure suspended above a substrate, the piezoelectric mechanical resonating structure having a first surface proximate the substrate and a second surface substantially opposite the first surface and distal the substrate, the piezoelectric mechanical resonating structure comprising a first layer of material adjacent the second surface, the method comprising:
-
exciting a Lamb wave in the piezoelectric mechanical resonating structure; heating the piezoelectric mechanical resonating structure while exciting the Lamb wave by generating heat from a heating element disposed between the substrate and the first layer of material adjacent the second surface; and sensing a temperature of the piezoelectric mechanical resonating structure using a temperature sensor. - View Dependent Claims (11, 12, 13, 14)
-
-
15. A device, comprising:
-
a piezoelectric mechanical resonating structure suspended above a substrate by anchors coupled to first and second sides of the piezoelectric mechanical resonating structure; a plurality of electrodes configured to excite a Lamb wave in the piezoelectric mechanical resonating structure; a heating element disposed proximate a surface of the piezoelectric mechanical resonating structure facing the substrate; and a temperature sensor configured to detect a temperature of the mechanical resonating structure. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification