Calibration of MEMS sensor
First Claim
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1. A method comprising:
- exciting a micro electromechanical systems (MEMS) sensor, via an electrical impulse, to cause a flexure of the MEMS sensor to vibrate and ring down;
measuring a mechanical response of the MEMS sensor resulting from excitation of the MEMS sensor, as a voltage corresponding to vibration and the ring down of the flexure over time;
determining a parameter of the MEMS sensor based on the response of the MEMS sensor that has been measured, by fitting a damped sinusoidal function corresponding to the vibration and the ring down over time to determine a resonant frequency and a Q value of the flexure; and
,calibrating the MEMS sensor based on the parameter of the MEMS sensor that has been determined.
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Abstract
A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.
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Citations
11 Claims
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1. A method comprising:
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exciting a micro electromechanical systems (MEMS) sensor, via an electrical impulse, to cause a flexure of the MEMS sensor to vibrate and ring down; measuring a mechanical response of the MEMS sensor resulting from excitation of the MEMS sensor, as a voltage corresponding to vibration and the ring down of the flexure over time; determining a parameter of the MEMS sensor based on the response of the MEMS sensor that has been measured, by fitting a damped sinusoidal function corresponding to the vibration and the ring down over time to determine a resonant frequency and a Q value of the flexure; and
,calibrating the MEMS sensor based on the parameter of the MEMS sensor that has been determined. - View Dependent Claims (2, 3, 4, 5, 6, 11)
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7. A micro electromechanical systems (MEMS) sensor comprising:
- a flexure configured to physically displace responsive to an external stimulus;
a plurality of electrodes to which an electrical sweep is applied to provide the external stimulus, and configured to indirectly detect physical displacement of the flexure via a measurement of an electrical response resulting from the external stimulus, as an alternating current (AC) voltage resulting from vibration of the flexure; and
a processor configured to determine a parameter of the MEMS sensor by determining a change in the AC voltage corresponding to the vibration of the flexure per phase of the AC voltage, and configured to calibrate the electrical response of the MEMS sensor by calibrating a ratio of a voltage output by the MEMS sensor to the physical displacement of the flexure based on the ratio of the change in the AC voltage to the phase of the AC voltage. - View Dependent Claims (8)
- a flexure configured to physically displace responsive to an external stimulus;
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9. A system comprising:
- an array of MEMS sensors, each MEMS sensor being individually calibratable in a field environment in which the array is deployed, each MEMS sensor comprising;
a flexure configured to physically displace responsive to an external stimulus;
a plurality of electrodes configured to detect physical displacement of the flexure, via a measurement of a mechanical response of the MEMS sensor and an electrical response of the MEMS sensor; and
one or more processors configured to calibrate the MEMS sensors responsive to known forced excitations of the flexures, based on detections of the physical displacements of the flexures by the electrodes, by calibrating an overall sensitivity of each MEMS sensor expressed as a ratio of voltage to acceleration of the MEMS sensor, based on the mechanical response and the electrical response of the MEMS sensor. - View Dependent Claims (10)
- an array of MEMS sensors, each MEMS sensor being individually calibratable in a field environment in which the array is deployed, each MEMS sensor comprising;
Specification