Lockout tagout for semiconductor vacuum valve

• US 9,404,587 B2
• Filed: 04/24/2014
• Issued: 08/02/2016
• Est. Priority Date: 04/24/2014
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Shugrue, John, Moen, Ron
• Primary Examiner(s): Murphy, Kevin
• Assistant Examiner(s): Trinidad-Borges, Josephine
• Application Number:
  US14/260,701
• Publication Number:
  US 20150308586A1
• Time in Patent Office: 831 Days
• Field of Search: 251/90, 251/92, 251/285, 137/385, 701/77
• US Class Current: 1/1
• CPC Class Codes: F16K 3/0254 being operated by particular means
• CPC Class Codes: F16K 35/02 to be locked or disconnected by means of a pushing or pulling action
• CPC Class Codes: F16K 35/022 the locking mechanism being actuated by a separate actuating element
• CPC Class Codes: F16K 35/06 using a removable actuating or locking member, e.g. a key F16K35/10, F16K35/12 take precedence
• CPC Class Codes: F16K 35/10 with locking caps or locking bars
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.

Claims

1. A device for limiting travel of a valve comprising:

a body removably connected to a vacuum valve or a reaction chamber, the body comprising a cutout to receive a portion of a gate of the valve, wherein the gate moves linearly in a first direction;

a travel limiting rod passing through the body to engage and limit travel of the gate along the first direction by moving the travel limiting rod in a second direction opposite the first direction;

wherein the body includes at least one mounting flange opposite the travel limiting rod; and

wherein the travel limiting rod is rotatable in a first rotational direction to restrict valve movement and rotatable in a second rotational direction to permit valve movement.

2. The device of claim 1 wherein the at least one mounting flange further comprises an alignment aperture.

3. The device of claim 2 further comprising at least two mounting flanges.

4. The device of claim 1 wherein the body comprises a bottom wall extending perpendicular to the mounting flange.

5. The device of claim 4 wherein the bottom wall comprises a hole for receiving the travel limiting rod.

6. The device of claim 5 wherein the hole is threaded.

7. The device of claim 6 wherein the travel limiting rod is threaded.

8. The device of claim 6 wherein only a portion of the travel limiting rod is threaded.

9. The device of claim 4 wherein the bottom wall further comprises a locking hole.

10. The device of claim 9 wherein the travel limiting rod further comprises a plurality of holes which can be aligned with the locking hole.

11. The device of claim 1 wherein the travel limiting rod further comprises a recessed portion on one end.

12. The device of claim 11 wherein the recessed portion is engaged with a valve.

13. The device of claim 1 wherein the device may be removed from the vacuum valve or the reaction chamber.

14. The device of claim 1 wherein the at least one mounting flange further comprises a mounting aperture.

15. The device of claim 1 wherein the body further comprises a valve tab.

16. A method of locking out a vacuum valve comprising the steps of:

providing a vacuum valve comprising a gate that moves in a first direction;

mounting a body to the vacuum valve or a surface;

positioning a travel limiting rod within a portion of the body to limit travel of the gate along the direction;

moving the travel limiting rod in a second direction opposite the first direction to a position which restricts movement of the vacuum valve; and

wherein the travel limiting rod is rotated into contact with a valve pin of the vacuum valve.

17. The method of claim 16 wherein the body further comprises at least one aperture for receiving a mounting pin.

18. The method of claim 16 further comprising the step of removing the body after performing a maintenance operation.

19. The method of claim 16 further comprising the step of locking the travel limiting rod with a secondary lock.