×

Microelectromechanical gyroscope with compensation of quadrature error drift

  • US 9,404,747 B2
  • Filed: 10/30/2013
  • Issued: 08/02/2016
  • Est. Priority Date: 10/30/2013
  • Status: Active Grant
First Claim
Patent Images

1. A microelectromechanical gyroscope, comprising:

  • a supporting body;

    a first movable mass configured to oscillate with respect to the supporting body along a first driving axis and configured to rotate about a first sensing axis;

    a second movable mass configured to oscillate with respect to the supporting body along the first driving axis and configured to rotate around a second sensing axis;

    a first plurality of driving electrodes positioned within the first moveable mass;

    a second plurality of driving electrodes positioned within the second moveable mass;

    a first sensing electrode and a second sensing electrode associated with the first movable mass and arranged on the supporting body symmetrically with respect to the first sensing axis, the first movable mass being capacitively coupled to the first sensing electrode and to the second sensing electrode, the first and second sensing electrodes being separated by the first plurality of driving electrodes; and

    a third sensing electrode and a fourth sensing electrode associated with the second movable mass and arranged on the supporting body symmetrically with respect to the second sensing axis, the second movable mass being capacitively coupled to the third sensing electrode and to the fourth sensing electrode, the third and fourth sensing electrodes being separated by the second plurality of driving electrodes.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×