Compliant bipolar micro device transfer head with silicon electrodes
First Claim
Patent Images
1. An electrostatic transfer head array comprising:
- a base substrate;
an insulating layer on the base substrate;
a device layer on the insulating layer, the device layer comprising;
a first trace interconnect integrally formed with a first array of electrodes; and
a second trace interconnect integrally formed with a second array of electrodes;
wherein the first array of electrodes is electrically insulated from the second array of electrodes;
an array of dielectric joints between the first array of electrodes and the second array of electrodes;
wherein the first trace interconnect and the second trace interconnect are parallel to one another, and the dielectric joints are perpendicular to the first trace interconnect and the second trace interconnect.
1 Assignment
0 Petitions
Accused Products
Abstract
A compliant bipolar micro device transfer head array and method of forming a compliant bipolar micro device transfer array from an SOI substrate are described. In an embodiment, a compliant bipolar micro device transfer head array includes a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include first and second silicon interconnects, and first and second arrays of silicon electrodes electrically connected with the first and second silicon interconnects and deflectable into one or more cavities between the base substrate and the silicon electrodes.
-
Citations
16 Claims
-
1. An electrostatic transfer head array comprising:
-
a base substrate; an insulating layer on the base substrate; a device layer on the insulating layer, the device layer comprising; a first trace interconnect integrally formed with a first array of electrodes; and a second trace interconnect integrally formed with a second array of electrodes; wherein the first array of electrodes is electrically insulated from the second array of electrodes; an array of dielectric joints between the first array of electrodes and the second array of electrodes; wherein the first trace interconnect and the second trace interconnect are parallel to one another, and the dielectric joints are perpendicular to the first trace interconnect and the second trace interconnect. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
Specification