Fabrication method of microfluidic devices

• US 9,409,167 B2
• Filed: 04/25/2011
• Issued: 08/09/2016
• Est. Priority Date: 07/07/2010
• Status: Active Grant

• Current Assignee: Ikerlan S. Coop
• Original Assignee: Ikerlan S. Coop
• Inventors: Laouenan, Florian, Aranburu, Inigo, Ruano, Jesus, Ezkerra, Aitor, Agirregabiria, Maria, Elizalde, Jorge, Berganzo, Javier, Fernandez, Luis J.
• Primary Examiner(s): Chan, Sing P
• Application Number:
  US13/808,853
• Publication Number:
  US 20140102636A1
• Time in Patent Office: 1,933 Days
• Field of Search: 156/230, 156/247, 156/249, 156/285, 156/286, 156/305, 156/306.3, 156/308.2, 156/308.4
• US Class Current: 1/1
• CPC Class Codes: B01L 3/5027 by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip B01L3/5023 takes precedence; micromixers B01F33/30; microreactors for synthesis B01J19/0093; microcapillary devices in general B81B1/00
• CPC Class Codes: B29C 65/76 Making non-permanent or releasable joints
• CPC Class Codes: B29C 66/028 Non-mechanical surface pre-treatments, i.e. by flame treatment, electric discharge treatment, plasma treatment, wave energy or particle radiation B29C65/14 takes precedence; non-mechanical surface treatment of plastics in general B29C59/08 - B29C59/16
• CPC Class Codes: B29C 66/112 Single lapped joints
• CPC Class Codes: B29C 66/114 Single butt joints
• CPC Class Codes: B29C 66/53461 joining substantially flat covers and/or substantially flat bottoms to open ends of container bodies
• CPC Class Codes: B29C 66/71 characterised by the composition of the plastics material of the parts to be joined welding bar compositions B29C65/125
• CPC Class Codes: B29C 66/73117 Tg, i.e. glass transition temperature
• CPC Class Codes: B29C 66/7352 Thickness, e.g. very thin
• CPC Class Codes: B29C 66/73921 characterised by the materials of both parts being thermoplastics
• CPC Class Codes: B29K 2023/38 Polymers of cycloalkenes, e.g. norbornene or cyclopentene
• CPC Class Codes: B29L 2031/756 Microarticles, nanoarticles
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81C 2203/032 Gluing
• CPC Class Codes: B81C 2203/036 Fusion bonding
• CPC Class Codes: B81C 3/001 Bonding of two components
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 2099/0094 Micropumps
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 : Diaphragm or membrane valves

Abstract

Fabrication method of microfluidic devices consisting of a sheet (1) which is 200 micrometer thick or less and a rigid part (3), both made of thermoplastic polymeric material includes degasification of a polymeric sheet of thermoplastic material (1), an auxiliary rigid part (2), and a polymeric rigid part of thermoplastic material (3). A temporary bonding procedure, of the degassed thermoplastic polymeric sheet (1) to a degassed auxiliary rigid part (2), is conducted producing a sheet-auxiliary part set (4). A permanent bonding procedure bonds the thermoplastic polymeric sheet (1) of the sheet-auxiliary part set (4) obtained in the previous temporary bonding stage, to the thermoplastic polymeric rigid part (3) which was initially degassed. The auxiliary rigid part (2) of the thermoplastic polymeric sheet (1) permanently bonded to the thermoplastic rigid part (3), is detached to produce a final part which is completely polymeric (5).

Claims

1. Method for manufacturing microfluidic devices including a thermoplastic polymer sheet which is 200 micrometer thick or less used to seal, without adhesive, a channel, and used to form a microvalve or a micropump formed on a rigid part, both made of thermoplastic polymeric material, comprising the stages of:

initially degasifying;

a thermoplastic polymeric sheet,

an auxiliary thermoplastic polymeric rigid part,

a thermoplastic polymeric rigid part of thermoplastic material;

bonding without adhesive through a temporary bonding procedure, of the degassed thermoplastic polymeric sheet to the degassed auxiliary thermoplastic polymeric rigid part, obtaining a sheet-auxiliary part set;

bonding without adhesive through a permanent bonding procedure, of the thermoplastic polymeric sheet of the sheet-auxiliary part set obtained in the previous temporary bonding stage, to the thermoplastic polymeric rigid part which was initially degassed;

detaching the auxiliary thermoplastic polymeric rigid part of the thermoplastic polymeric sheet permanently bonded to the thermoplastic polymeric rigid part, to produce a final part which is completely polymeric.

2. The method of manufacturing according to claim 1, wherein the permanent bonding procedure comprises:

applying a solvent on the thermoplastic polymeric sheet of the sheet-auxiliary part set,

removing any excess solvent until a dry and slightly adherent surface is attained,

contacting the sheet-auxiliary part set with the thermoplastic polymeric rigid part,

applying pressure on both parts in contact.

3. The method of manufacturing according to claim 2, wherein the pressure applied is between 0.1 bar and 10 bar.

4. The method of manufacturing according to claim 1, wherein the permanent bonding procedure is through thermocompression and comprises:

contacting the sheet-auxiliary part set with the thermoplastic polymeric rigid part,

applying a temperature close or equal to the glass transition temperature of the thermoplastic polymeric sheet and of the thermoplastic polymeric rigid part,

applying a pressure between 0.1 bar and 10 bar which allows the fusion between the thermoplastic polymeric sheet and of the thermoplastic polymeric rigid part.

5. The method of manufacturing according to claim 1, wherein the degasification is made by insertion of the parts in a vacuum chamber or heating at a temperature selected between room temperature and the glass transition temperature of each part.

6. The method of manufacturing according claim 1, wherein the temporary bonding is performed through non-permanent thermocompression between the thermoplastic polymeric sheet and the auxiliary thermoplastic polymeric rigid part, at a temperature close or equal to the glass transition temperature of the thermoplastic polymeric sheet and at a pressure between 0.1 bar and 10 bar.

7. The method of manufacturing according to claim 1, wherein the temporary bonding is performed through ozone-assisted temporary bonding.

8. The method of manufacturing according to claim 7, wherein the thermoplastic polymeric sheet is cyclo-olefin copolymer or cyclo-olefin polymer.

9. The method of manufacturing according to claim 1, wherein the temporary bonding is performed through electrostatic charge-assisted temporary bonding.

10. The method of manufacturing according to claim 1, wherein the degasification is made by insertion of the parts in a vacuum chamber and heating at a temperature selected between room temperature and the glass transition temperature of each part.