Micromachined piezoelectric z-axis gyroscope
First Claim
1. A method of fabricating a gyroscope, comprising:
- depositing conductive material on a substrate;
forming a central anchor;
forming a sense frame disposed around the central anchor;
forming a plurality of sense beams, each of the sense beams including piezoelectric sense electrodes, the sense beams capable of connecting the sense frame to the central anchor;
forming a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side;
forming at least one pair of drive beams disposed on opposing sides of the sense frame, the drive beams capable of driving the first side of the drive frame in a first direction along a first axis in the plane of the drive frame, the drive beams being further capable of driving the second side of the drive frame in a second and opposing direction along the first axis;
forming a drive frame suspension capable of substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis, wherein forming the drive frame suspension involves forming a plurality of flexures, each flexure of the plurality of flexures capable of coupling a pair of drive beams to the drive frame; and
forming a sense frame suspension capable of being compliant to rotation around a second axis orthogonal to the first axis.
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Accused Products
Abstract
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
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Citations
20 Claims
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1. A method of fabricating a gyroscope, comprising:
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depositing conductive material on a substrate; forming a central anchor; forming a sense frame disposed around the central anchor; forming a plurality of sense beams, each of the sense beams including piezoelectric sense electrodes, the sense beams capable of connecting the sense frame to the central anchor; forming a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side; forming at least one pair of drive beams disposed on opposing sides of the sense frame, the drive beams capable of driving the first side of the drive frame in a first direction along a first axis in the plane of the drive frame, the drive beams being further capable of driving the second side of the drive frame in a second and opposing direction along the first axis; forming a drive frame suspension capable of substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis, wherein forming the drive frame suspension involves forming a plurality of flexures, each flexure of the plurality of flexures capable of coupling a pair of drive beams to the drive frame; and forming a sense frame suspension capable of being compliant to rotation around a second axis orthogonal to the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification