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Integrated circuits including inductors

  • US 9,412,805 B2
  • Filed: 02/25/2013
  • Issued: 08/09/2016
  • Est. Priority Date: 02/23/2011
  • Status: Active Grant
First Claim
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1. An integrated circuit comprising:

  • a substrate having a surface;

    an inductor disposed over the surface of the substrate, the inductor configured to generate a magnetic field substantially parallel to the surface, wherein the inductor comprises;

    a first conductive line disposed over the surface;

    a plurality of first conductive structures disposed over and electrically coupled with the first conductive line, each of the plurality of first conductive structures having a first cross-sectional shape;

    a plurality of second conductive structures disposed over and electrically coupled with a respective one of the plurality of first conductive structures, each of the plurality of second conductive structures having a second cross-sectional shape different from the first cross-sectional shape;

    a second conductive line disposed over and electrically coupled with the plurality of second conductive structures;

    a plurality of third conductive structures disposed over and electrically coupled with the first conductive line, each of the plurality of third conductive structures having a third cross-sectional shape;

    at least one fourth conductive structure disposed over and electrically coupled with a respective one of the plurality of third conductive structures, each of the at least one fourth conductive structures having a fourth cross-sectional shape different from the third cross-sectional shape; and

    a third conductive line disposed over and electrically coupled with the at least one fourth conductive structure, the third conductive line extending substantially parallel to the second conductive line,the second conductive line, the first conductive line, and the third conductive line being configured to define a coil standing vertically over the substrate; and

    a shielding element, the shielding element comprising a first plurality of substantially parallel shielding portions located between the inductor and the substrate,the shielding element further comprises a second plurality of substantially parallel shielding portions, a first shielding portion of the second plurality of substantially parallel shielding portions is located between the first conductive line and the second conductive line, and a second shielding portion of the second plurality of substantially parallel shielding portions is located between the second conductive line and the third conductive line.

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