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Asymmetrical detector design and methodology

  • US 9,418,819 B2
  • Filed: 09/03/2014
  • Issued: 08/16/2016
  • Est. Priority Date: 09/06/2013
  • Status: Active Grant
First Claim
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1. A charged particle detection device, comprising:

  • a detector having an active portion and an inactive portion formed on a surface of a substrate, the surface being divided into the active portion and the inactive portion, whereby the active portion and the inactive portion make up an entirety of the surface of the substrate, wherein only the active portion is configured to produce a signal in response to secondary charged particles emitted from a sample landing on the active portion, wherein the substrate is symmetric with respect to an axis through a central aperture and wherein the active portion is asymmetric with respect to the axis to, accommodate an estimated axially asymmetrical distribution of the secondary particles at the detector with respect to a beam axis of a charged particle beam optical system.

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