Silicon condenser microphone
First Claim
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1. A silicon condenser microphone, comprising:
- a substrate including a side surrounding a cavity;
a transducer unit supported by the substrate, including a backplate and a diaphragm forming a capacitor with the backplate;
a partition positioned in the cavity of the substrate for dividing the cavity into an upper cavity and a lower cavity, the partition including a main body connected to an inner surface of the side of the substrate, a protrusion extending from the main body, and a perforation penetrating the protrusion and the main body for communicating the upper cavity with the lower cavity.
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Abstract
A silicon condenser microphone is disclosed. The silicon condenser microphone includes a substrate including a side surrounding a cavity, a transducer unit supported by the substrate, a partition positioned in the cavity of the substrate for dividing the cavity into an upper cavity and a lower cavity. The transducer unit includes a backplate and a diaphragm forming a capacitor. The partition includes a main body connected to an inner surface of the side of the substrate, and a perforation penetrating the main body for communicating the upper cavity with the lower cavity. The sensitivity of the silicon condenser microphone is accordingly improved.
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5 Claims
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1. A silicon condenser microphone, comprising:
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a substrate including a side surrounding a cavity; a transducer unit supported by the substrate, including a backplate and a diaphragm forming a capacitor with the backplate; a partition positioned in the cavity of the substrate for dividing the cavity into an upper cavity and a lower cavity, the partition including a main body connected to an inner surface of the side of the substrate, a protrusion extending from the main body, and a perforation penetrating the protrusion and the main body for communicating the upper cavity with the lower cavity. - View Dependent Claims (2, 3, 4, 5)
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Specification