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Silicon condenser microphone

  • US 9,420,365 B2
  • Filed: 10/27/2014
  • Issued: 08/16/2016
  • Est. Priority Date: 07/28/2014
  • Status: Active Grant
First Claim
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1. A silicon condenser microphone, comprising:

  • a substrate including a side surrounding a cavity;

    a transducer unit supported by the substrate, including a backplate and a diaphragm forming a capacitor with the backplate;

    a partition positioned in the cavity of the substrate for dividing the cavity into an upper cavity and a lower cavity, the partition including a main body connected to an inner surface of the side of the substrate, a protrusion extending from the main body, and a perforation penetrating the protrusion and the main body for communicating the upper cavity with the lower cavity.

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