Feedback control of dimensions in nanopore and nanofluidic devices

• US 9,422,154 B2
• Filed: 02/04/2011
• Issued: 08/23/2016
• Est. Priority Date: 11/02/2010
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Harrer, Stefan, Rossnagel, Stephen M., Waggoner, Philip S.
• Primary Examiner(s): Lin, James
• Assistant Examiner(s): Chung, Ho-Sung
• Application Number:
  US13/021,544
• Publication Number:
  US 20120103821A1
• Time in Patent Office: 2,027 Days
• US Class Current: 1/1
• CPC Class Codes: B81C 1/00071 Channels
• CPC Class Codes: B81C 2201/0114 Electrochemical etching, anodic oxidation
• CPC Class Codes: C25D 9/06 by anodic processes

Abstract

Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.

Claims

1. A method comprising:

providing an array of fluidic elements, each of the fluidic elements being connected in series to one or more other fluidic elements in the array by one or more nanofluidic passages, each of the nanofluidic passages including an electrochemically active, electrically conductive surface, and

selectively closing one or more of the nanofluidic passages by oxidizing the electrically conductive surface, thereby causing an oxidized layer formed from the electrically conductive surface to electrochemically grow on the electrically conductive surface in selected nanofluidic passages.

2. The method of claim 1 wherein the electrically conductive surface of each of the nanofluidic passages includes a metal or metal alloy, each nanofluidic passage further including an electrolyte therein, the step of selectively closing includes applying an electric potential between the electrically conductive surface and the electrolyte, and further wherein the oxidized layer comprises an oxide of the metal or metal alloy.

3. A method comprising:

providing a nanofluidic device including a base, a first layer on the base, a second layer on the first layer, a nanofluidic passage having an electrically conductive metal or metal alloy surface extending through the second layer, a reservoir formed beneath the second layer and within the first layer, the reservoir being in fluid communication with the nanofluidic passage, and an electrolyte within the nanofluidic passage; and

applying a voltage to the electrically conductive metal or metal alloy surface to electrochemically change the dimensions of the nanofluidic passage.

4. The method of claim 3 further including reducing the dimensions of the nanofluidic passage by oxidizing the electrically conductive surface.

5. The method of claim 3 further comprising the steps of causing an ionic current to flow through the nanofluidic passage, monitoring the ionic current, and discontinuing applying the voltage when the ionic current reaches a preselected level.

6. The method of claim 3 wherein the nanofluidic device includes a nanofilter membrane having a large plurality of nanofluidic passages, further including the step of electrochemically changing the dimensions of the nanofluidic passages within the membrane.

7. The method of claim 6 further including monitoring an ionic current through the nanofilter membrane and discontinuing applying the voltage when the ionic current reaches a preselected level.