Slit valve having increased flow uniformity
First Claim
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1. A slit valve, comprising:
- a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough;
a door to selectively open and close the opening of the slit valve;
a gas inlet formed in the housing;
a plenum disposed in the housing, wherein the gas inlet is coupled to a longitudinal end of the plenum, and wherein the volume of the plenum increases in a direction moving away from the gas inlet;
a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the plenum; and
a counterbore disposed on a plenum side of one or more of the gas outlets.
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Abstract
Methods and apparatus for increasing flow uniformity are provided herein. In some embodiments, a slit valve having increased flow uniformity may be provided, the slit valve may include a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a gas inlet formed in the housing; an outer plenum disposed in the housing and coupled to the gas inlet; an inner plenum disposed in the housing and coupled to the outer plenum via a plurality of holes; and a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the inner plenum.
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Citations
20 Claims
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1. A slit valve, comprising:
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a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a door to selectively open and close the opening of the slit valve; a gas inlet formed in the housing; a plenum disposed in the housing, wherein the gas inlet is coupled to a longitudinal end of the plenum, and wherein the volume of the plenum increases in a direction moving away from the gas inlet; a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the plenum; and a counterbore disposed on a plenum side of one or more of the gas outlets. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A slit valve, comprising:
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a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a door to selectively open and close the opening of the slit valve; a gas inlet formed in the housing; a plenum disposed in the housing, wherein the gas inlet is coupled to a longitudinal end of the plenum, and wherein the volume of the plenum increases in a direction moving away from the gas inlet; and a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the plenum, wherein at least one gas outlet has a volume that is different than a volume of at least one other gas outlet. - View Dependent Claims (9, 10, 11, 12)
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13. An apparatus for processing a substrate, comprising:
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a process chamber; and a slit valve coupled to the process chamber, the slit valve comprising; a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a door to selectively open and close the opening of the slit valve; a gas inlet formed in the housing; a plenum disposed in the housing and coupled to the gas inlet, wherein the as inlet is coupled to a longitudinal end of the plenum, and wherein the volume of the plenum increases in a direction moving away from the gas inlet; a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the plenum; and a counterbore disposed on a plenum side of one or more of the gas outlets. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification