MEMS hemispherical resonator gyroscope
First Claim
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1. A MEMS gyroscope comprising:
- a substrate comprising an amorphous material having a substantially planar surface, a substantially hemispherical cavity extending into the surface of the amorphous material substrate, an actuation electrode, and a plurality of sensing electrodes;
a resonator including a substantially hemispherical shell suspended within the cavity by a stem coupling the center of the bottom of the cavity to the center of the bottom of the shell; and
an electronic processor configured to;
cause a voltage to be applied to the actuation electrode;
receive signals from the sensing electrodes; and
process the received signals to determine rotation of the MEMS gyroscope.
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Abstract
A MEMS gyroscope is provided. A substrate can be formed with a substantially planar surface, a substantially hemispherical cavity extending into the surface, an actuation electrode, and a plurality of sensing electrodes. A resonator formed from a substantially hemispherical shell can be suspended within the cavity by a stem coupling the center of the bottom of the cavity to the center of the bottom of the shell. An electronic processor can be configured to cause a voltage to be applied to the actuation electrode, receive signals from the sensing electrodes, and process the received signals to determine rotation of the MEMS gyroscope.
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29 Claims
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1. A MEMS gyroscope comprising:
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a substrate comprising an amorphous material having a substantially planar surface, a substantially hemispherical cavity extending into the surface of the amorphous material substrate, an actuation electrode, and a plurality of sensing electrodes; a resonator including a substantially hemispherical shell suspended within the cavity by a stem coupling the center of the bottom of the cavity to the center of the bottom of the shell; and an electronic processor configured to; cause a voltage to be applied to the actuation electrode; receive signals from the sensing electrodes; and process the received signals to determine rotation of the MEMS gyroscope. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification