Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
First Claim
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1. An inertial device, comprising:
- a fixed element comprising a first plurality of beams that are spaced along a first axis;
a first plurality of teeth, adjacent teeth of which are equally spaced along a second axis perpendicular to the first axis, each of the first plurality of teeth disposed on a respective beam of the first plurality of beams;
a moveable element comprising a second plurality of beams that are spaced along the first axis, the moveable element configured to move relative to the fixed element along the second axis;
a second plurality of teeth, adjacent teeth of which are equally spaced along the second axis, each of the second plurality of teeth disposed on a respective beam of the second plurality of beams;
a sensor configured to generate an output voltage based on a current between the fixed and moveable elements;
comparator circuitry configured to produce an output signal based on detecting the output voltage crossing a threshold;
a time-to-digital converter configured to determine time intervals based on the output signal; and
signal processing circuitry configured to determine an inertial parameter from the time intervals;
wherein monotonic motion of the moveable element relative to the fixed element causes a reversal in direction of the current.
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Abstract
Systems and methods are disclosed herein for extracting system parameters from nonlinear periodic signals from sensors. A sensor such as an inertial device includes a first structure and a second structure that is springedly coupled to the first structure. The sensor is configured to generate an output voltage based on a current between the first and second structures. Monotonic motion of the second structure relative to the first structure causes a reversal in direction of the current.
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Citations
19 Claims
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1. An inertial device, comprising:
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a fixed element comprising a first plurality of beams that are spaced along a first axis; a first plurality of teeth, adjacent teeth of which are equally spaced along a second axis perpendicular to the first axis, each of the first plurality of teeth disposed on a respective beam of the first plurality of beams; a moveable element comprising a second plurality of beams that are spaced along the first axis, the moveable element configured to move relative to the fixed element along the second axis; a second plurality of teeth, adjacent teeth of which are equally spaced along the second axis, each of the second plurality of teeth disposed on a respective beam of the second plurality of beams; a sensor configured to generate an output voltage based on a current between the fixed and moveable elements; comparator circuitry configured to produce an output signal based on detecting the output voltage crossing a threshold; a time-to-digital converter configured to determine time intervals based on the output signal; and signal processing circuitry configured to determine an inertial parameter from the time intervals; wherein monotonic motion of the moveable element relative to the fixed element causes a reversal in direction of the current. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification