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Metrology device and a method for compensating for bearing runout error

  • US 9,423,282 B2
  • Filed: 06/03/2015
  • Issued: 08/23/2016
  • Est. Priority Date: 06/12/2014
  • Status: Active Grant
First Claim
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1. A method of determining an angular rotation position of a metrology device, the method comprising:

  • providing an encoder coupled to at least one bearing, the encoder having at least a first read head and a second read head, the encoder configured to measure in operation an angular rotation of the at least one bearing;

    rotating the at least one bearing for a predetermined number of rotations;

    generating a first signal with the first read head and a second signal with the second read head in response to the rotation of the at least one bearing;

    defining a first waveform by subtracting the first signal from the second signal;

    perform a Fourier analysis on the first waveform to define a series of sinusoidal waves for the predetermined number of rotations;

    generating with a processor circuit operably coupled to the metrology device a transfer function of bearing runout based on the series of sinusoidal waves as a function of absolute angular position of the at least one bearing; and

    storing, in a memory of the processor circuit, the first waveform and the transfer function.

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