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Pressure sensor, method for manufacture thereof, and pressure detection module

  • US 9,423,309 B2
  • Filed: 04/20/2012
  • Issued: 08/23/2016
  • Est. Priority Date: 05/30/2011
  • Status: Active Grant
First Claim
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1. A method for manufacture of a pressure sensor, comprising:

  • forming a conductor pattern by means of a subtractive process in which a metal foil laminated through an adhesive agent on a surface of a base film is subjected to etching processing to provide a pair of electrodes on said base film;

    laminating a photosensitive cover on said base film, and removing at least a portion of said conductor pattern corresponding to said pair of electrodes thereby to cause said portion to be exposed, while covering a remaining portion of said conductor pattern with a remaining portion of said photosensitive cover;

    applying metal plating treatment for prevention of oxidation to the exposed portion of said conductor pattern including said pair of electrodes; and

    forming, thereafter, a hollow portion opened to outside air in the removed portion of said photosensitive cover corresponding to said pair of electrodes, by laminating a cover film with a pressure sensing part formed thereon in advance in which contact resistance thereof changes according to a pressure of contact thereof with said electrodes, and by bonding said cover film to the remaining portion of said photosensitive cover by means of an adhesive agent.

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