Optical components

• US 9,423,360 B1
• Filed: 02/09/2015
• Issued: 08/23/2016
• Est. Priority Date: 02/09/2015
• Status: Active Grant

• Current Assignee: Microsoft Technology Licensing LLC (Microsoft Corporation)
• Original Assignee: Microsoft Technology Licensing LLC (Microsoft Corporation)
• Inventors: Kostamo, Pasi, Tervonen, Ari J.
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): AKANBI, ISIAKA O
• Application Number:
  US14/617,735
• Publication Number:
  US 20160231257A1
• Time in Patent Office: 561 Days
• Field of Search: 356399-401, 356/138
• US Class Current: 1/1
• CPC Class Codes: G01M 11/0264 by using targets or reference patterns
• CPC Class Codes: G01N 2021/9511 Optical elements other than lenses, e.g. mirrors
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/958 Inspecting transparent materials or objects, e.g. windscreens for conveyed flat sheet or rod G01N21/896
• CPC Class Codes: G02B 27/4255 for alignment or positioning purposes optical displacement encoding scales G01D5/347
• CPC Class Codes: G02B 27/4277 being separated by an air space
• CPC Class Codes: G02B 5/1819 Plural gratings positioned on the same surface, e.g. array of gratings plural diffractive elements positioned sequentially along the optical path G02B27/4272
• CPC Class Codes: G02B 5/1866 Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence

Abstract

The following relates to assessing the quality of an optical component. The optical component comprises an arrangement of a first and a second optically transmissive component grating having a component relative orientation angle, and the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle. A master component comprises a substantially matching arrangement of a first and a second optically transmissive master grating having the desired relative orientation angle. The components are supported with the first and second component gratings in the vicinity of the first and second master gratings, and first and second fringe patterns formed by the first gratings and second gratings respectively are used to output a quality assessment, which is based on the fringe spacing of the second fringe pattern when the fringe spacing of the first fringe pattern is substantially maximal.

Claims

1. A quality assessment apparatus for assessing the quality of an optical component, the optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle, wherein the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle, the apparatus comprising:

a configurable support system configured to support a master component comprising a substantially matching arrangement of a first and a second master grating having the desired relative orientation angle and to support the optical component with the first and second component gratings in the vicinity of the first and second master gratings, the apparatus further comprising;

a light sensor configured to receive light which has interacted with both of the first gratings and light which has interacted with both of the second gratings, and to generate sensor data from the received light;

a drive mechanism coupled to the support system; and

a controller configured (i) to control the drive mechanism based on the sensor data to reconfigure the support system from a current configuration to a new configuration in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal and (ii) to measure from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration, and to output a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.

2. A quality assessment apparatus according to claim 1, wherein the optical component and the master component comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, wherein the sensor senses the marks, and wherein the controller is configured based on sensor data pertaining to the marks to reconfigure the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is then reconfigured to the new configuration.

3. A quality assessment apparatus according to claim 1, wherein the light sensor comprises a camera which captures images of the first fringe pattern as the support system is reconfigured, and wherein the controller comprises an image recognition module which performs an automatic image recognition procedure to detect the first fringe pattern in the images, wherein the controller reconfigures the support system based on the results of the image recognition procedure.

4. A quality assessment apparatus according to claim 3, wherein the images are also of the second fringe pattern, the automatic image recognition procedure detects the second fringe pattern, and the controller measures the fringe spacing of the second fringe pattern based on the results of the image recognition procedure.

5. A quality assessment apparatus according to claim 1, wherein the light sensor comprises a sensor component which receives light of only a small portion of the first fringe pattern as the support system is reconfigured, and the controller reconfigures the support system based on the rate at which the intensity of that light changes.

6. A quality assessment apparatus according to claim 5, wherein the light sensor comprises another sensor component which receives light of only a small portion of the second fringe pattern, and the controller measures the fringe spacing of the second fringe pattern based on the rate at which the intensity of that light changes.

7. A quality assessment apparatus according to claim 1 comprising a laser which provides a beam and a beam expander which expands the beam to illuminate the gratings with an expanded beam that substantially encompasses the gratings so as to enhance the visibility of the fringe patterns.

8. A quality assessment process for assessing the quality of an optical component, the optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle, wherein the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle, wherein the optical component and a master component comprising a substantially matching arrangement of a first and a second master grating having the desired relative orientation angle are supported by a configurable support system with the first and second component gratings in the vicinity of the first and second master gratings, the process comprising:

receiving sensor data, the sensor data generated from light received which has interacted with both of the first gratings and light which has interacted with both of the second gratings;

reconfiguring the support system based on the sensor data from a current configuration to a new configuration, in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal;

measuring from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration; and

outputting a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.

9. A quality assessment process according to claim 8, wherein the optical component and the master component comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, and wherein the process comprises reconfiguring the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is then reconfigured to the new configuration.

10. A quality assessment process according to claim 8, wherein the component gratings are formed by surface modulations on the surface of the optical component.

11. A quality assessment process according to claim 8, wherein the surface modulations are on substantially parallel portions of the surface of the optical component.

12. A quality assessment process according to claim 8, wherein both the component gratings are formed by surface modulations on frontal portions of the surface of the optical component.

13. A quality assessment process according to claim 8 wherein one of the component gratings is formed by surface modulations on a frontal portion of the surface of the optical component and the other is formed by surface modulations on a rearward portion of the surface of the optical component.

14. A quality assessment process according to claim 8, wherein the optical component comprises polymer or is a mould for moulding such optical components.

15. A quality assessment process according to claim 8, comprising performing a microfabrication process on the master component to fabricate the master gratings prior to performing the steps of claim 8.

16. A quality assessment process according to claim 8 comprising testing the master component gratings to assess the quality of the master component prior to performing the steps of claim 8.

17. A quality assessment process according to claim 8, wherein the first component grating has a period d₁ and the second component grating has a period d₂, and the desired orientation angle of the master gratings is substantially arccos(d₁/(2d₂)).

18. An apparatus comprising:

one or more processors; and

a computer-readable storage medium having stored thereon code for assessing the quality of an optical component, the optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle, wherein the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle, wherein the optical component and a master component comprising a substantially matching arrangement of a first and a second master grating having the desired relative orientation angle are supported by a configurable support system with the first and second component gratings in the vicinity of the first and second master gratings, the code configured when executed by the one or more processors to cause operations comprising;

receiving sensor data, the sensor data generated from light which has interacted with both of the first gratings and light which has interacted with both of the second gratings;

reconfiguring the support system based on the sensor data from a current configuration to a new configuration, in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal;

measuring from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration; and

outputting a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.

19. An apparatus according to claim 18, wherein the optical component and the master component comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, wherein the sensor data includes sensor data pertaining to the marks, and wherein the operations comprise reconfiguring, based on the sensor data pertaining to the marks, the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is reconfigured to the new configuration.

20. An apparatus according to claim 18 wherein the sensor data comprises images of the first fringe pattern and the operations comprise performing automatic image recognition on the images to detect the first fringe pattern, wherein a drive mechanism coupled to the support system is controlled based on the results of the image recognition procedure.