Low offset vertical hall device and current spinning method

• US 9,423,471 B2
• Filed: 08/24/2015
• Issued: 08/23/2016
• Est. Priority Date: 02/08/2011
• Status: Expired due to Fees

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Ausserlechner, Udo, Motz, Mario
• Primary Examiner(s): LEDYNH, BOT L
• Application Number:
  US14/833,216
• Publication Number:
  US 20150369881A1
• Time in Patent Office: 365 Days
• Field of Search: 324/251
• US Class Current: 1/1
• CPC Class Codes: G01R 33/07 Hall effect devices
• CPC Class Codes: G01R 33/075 Hall devices configured for spinning current measurements
• CPC Class Codes: G01R 33/077 Vertical Hall-effect devices
• CPC Class Codes: H10B 61/00 Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
• CPC Class Codes: H10N 52/101 Semiconductor Hall-effect devices
• CPC Class Codes: H10N 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00 MRAM devices H10B61/00

Abstract

One embodiment of the present invention relates to a vertical Hall-effect device. The device includes at least two supply terminals arranged to supply electrical energy to the first Hall-effect region; and at least one Hall signal terminal arranged to provide a first Hall signal from the first Hall-effect region. The first Hall signal is indicative of a magnetic field which is parallel to the surface of the semiconductor substrate and which acts on the first Hall-effect region. One or more of the at least two supply terminals or one or more of the at least one Hall signal terminal comprises a force contact and a sense contact.

Claims

1. A vertical Hall-effect device, comprising:

a conductive tub having a first conductivity type and disposed in a semiconductor substrate;

an isolation structure arranged around a perimeter of the tub to electrically isolate the tub from other semiconductor devices that are outside the perimeter;

a plurality of contact pairs having respective first and second contacts in the tub; and

a controller configured to, in a first operating phase, concurrently control a first potential at the first contact of a first contact pair, control a second potential at the first contact of a second contact pair, and control a third potential at the first contact of a third contact pair;

the controller further configured to measure a Hall effect current at the second contact of the first, second, or third contact pair;

while the first, second, and third potentials are present.

2. The vertical Hall-effect device of claim 1, wherein two or three out of the first potential, the second potential, and the third potential are different.

3. The vertical Hall-effect device of claim 1, the controller comprising a feedback circuit coupled to the first contact pair, and configured to control the first potential at a first contact of the first contact pair by providing one or more feedback signals to the second contact of the first contact pair.

4. The vertical Hall-effect device of claim 3, wherein the feedback circuit comprises:

a transconductance stage having a first input node configured to receive an input signal from the first contact, a second input node configured to receive a reference signal, and an output node configured to output a current proportional to a difference in signals between the first and second input nodes and configured to feed or sink this current at the second contact of the first contact pair.

5. The vertical Hall-effect device of claim 1, where the vertical Hall-effect device is operated in a spinning current scheme that swaps the first, second, and third potentials which are controlled via feedback at the first contacts of the first, second, and third contact pairs, respectively, during operation.

6. The vertical Hall-effect device of claim 1, wherein the vertical Hall-effect device is operated in a spinning current scheme that swaps first and second contacts of at least one contact pair.

7. The vertical Hall-effect device of claim 1, where the measured Hall effect current responds to a magnetic field experienced by the Hall-effect device while the first, second, and third potentials are present.

8. The vertical Hall-effect device of claim 1, further comprising:

a third contact spaced apart from the respective first contacts and the respective second contacts, wherein second and third contacts are connected to form an effective second contact; and

wherein first and the effective second contact thereby form an effective contact pair.

9. The vertical Hall-effect device of claim 8, whereby the second and the third contact pairs are equal in geometry, size, or shape and the first contact is arranged symmetrically between the second and the third contacts.

10. The vertical Hall-effect device of claim 1, wherein the conductive tub is an n-type region and the plurality of contacts are n-type regions.

11. A vertical Hall-effect device, comprising:

a first tub having a first conductivity type and disposed in a semiconductor substrate;

a first plurality of contact pairs having respective first and second contacts in the first tub;

a second tub having the first conductivity type and disposed in the semiconductor substrate;

a second plurality of contact pairs having respective third and fourth contacts in the second tub; and

an electrical connection coupling a first contact in the first tub with a third or fourth contact in the second tub; and

a controller configured to, in a first operating phase, concurrently deliver a first fixed voltage potential to a first contact of a first contact pair and concurrently deliver a second fixed voltage potential to a first contact of a second contact pair, the controller further configured to measure a Hall effect current at a second contact while the first and second fixed voltage potentials are present.

12. The vertical Hall effect device of claim 11, wherein the controller is further configured to control a third potential at a first contact of a third contact pair, the controller further configured to measure a Hall effect current at a third contact while the first, second, and third potentials are present.

13. The vertical Hall-effect device of claim 11, further comprising

at least one feedback circuit configured to control a potential at first contacts of the contact pairs in the first tub and at third contacts of the contact pairs in the second tub, respectively, by providing one or more feedback signals to second contacts of the contact pairs in the first tub and to fourth contacts of the contact pairs in the second tub.

14. The vertical Hall-effect device of claim 11, wherein the first and second tubs are n-type regions and the first plurality of contact pairs and the second plurality of contact pairs comprise n-type regions.

15. A vertical Hall-effect device, comprising:

a first tub having a first conductivity type and disposed in a semiconductor substrate;

a first plurality of contact pairs having respective first and second contacts in the first tub;

a second tub having the first conductivity type and disposed in the semiconductor substrate;

a second plurality of contact pairs having respective third and fourth contacts in the second tub;

an electrical connection coupling a first coupled contact in the first tub with a second coupled contact in the second tub; and

at least one feedback circuit configured to control a potential at first contacts of the contact pairs in the first tub and at third contacts of the contact pairs in the second tub, respectively, by providing one or more feedback signals to second contacts of the contact pairs in the first tub and to fourth contacts of the contact pairs in the second tub.