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Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool

  • US 9,424,528 B2
  • Filed: 04/23/2014
  • Issued: 08/23/2016
  • Est. Priority Date: 03/08/2008
  • Status: Active Grant
First Claim
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1. A system, comprising:

  • a memory storing computer executable components; and

    a processor configured to execute the following computer executable components stored in the memory;

    a drift component that adjusts a manufacturing recipe for an asset produced by a manufacturing tool based at least on a set of variables and a probability distribution function to generate an adjusted manufacturing recipe for the asset, wherein a magnitude of change between a recipe parameter included in the manufacturing recipe and an adjusted recipe parameter included in the adjusted manufacturing recipe is determined based at least on the probability distribution function; and

    an objective autonomous learning engine that determines a function that predicts output metrics for the asset based on the adjusted manufacturing recipe, and relaxes a constraint for the output metrics to infer the function for the manufacturing tool.

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