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High-k transformers extending into multiple dielectric layers

  • US 9,424,970 B2
  • Filed: 11/29/2010
  • Issued: 08/23/2016
  • Est. Priority Date: 11/29/2010
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a substrate;

    a first plurality of dielectric layers over the substrate;

    a second plurality of dielectric layers over the first plurality of dielectric layers; and

    a first metal inductor comprising;

    a lower portion comprising a first plurality of ring-like structures, wherein each of the first plurality of ring-like structures extends into each of the first plurality of dielectric layers, wherein each of the first plurality of ring-like structures comprises first metal lines and first vias interconnecting the first metal lines;

    an upper portion overlying the lower portion, the upper portion comprising a second plurality of ring-like structures, wherein each of the second plurality of ring-like structures extends into each of the second plurality of dielectric layers, wherein each of the second plurality of ring-like structures comprises second metal lines and second vias interconnecting the second metal lines;

    a first metal bridge interconnecting two of the first plurality of ring-like structures wherein the first metal bridge extends into each of the first plurality of dielectric layers and not into the second plurality of dielectric layers, wherein the first metal bridge comprises third metal lines and third vias interconnecting the third metal lines; and

    a second metal bridge interconnecting two of the second plurality of ring-like structures, wherein the second metal bridge extends into each of the second plurality of dielectric layers and not into the first plurality of dielectric layers, wherein the second metal bridge comprises fourth metal lines and fourth vias interconnecting the fourth metal lines, and wherein the first metal bridge and the second metal bridge are separated from each other by a dividing dielectric layer.

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