Through silicon via including multi-material fill
First Claim
1. An apparatus comprising:
- a substrate including at least one via disposed in the substrate, wherein the substrate comprises;
a trench having a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein the top of the trench opens to a top opening, and the bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening; and
a mouth surrounding the top opening and extending between the upper surface and the top opening, wherein a mouth opening in the upper surface is larger than the top opening of the trench,a second substrate bonded to the substrate;
wherein the via comprises;
a dielectric layer disposed on an inside surface of a trench; and
a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate,wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit,wherein the second substrate includes a sense capacitor, wherein one electrode is formed by a device substrate connected through a conductive substrate bond to a first contact coupled to the inner portion and another electrode is formed by a second contact coupled to the outer portion.
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Accused Products
Abstract
An apparatus includes a substrate having at least one via disposed in the substrate, wherein the substrate includes a trench having a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein the top of the trench opens to a top opening, and the bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening. The apparatus can include a mouth surrounding the top opening and extending between the upper surface and the top opening, wherein a mouth opening in the upper surface is larger than the top opening of the trench, wherein the via includes a dielectric layer disposed on an inside surface of a trench. The apparatus includes and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate.
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Citations
22 Claims
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1. An apparatus comprising:
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a substrate including at least one via disposed in the substrate, wherein the substrate comprises; a trench having a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein the top of the trench opens to a top opening, and the bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening; and a mouth surrounding the top opening and extending between the upper surface and the top opening, wherein a mouth opening in the upper surface is larger than the top opening of the trench, a second substrate bonded to the substrate; wherein the via comprises; a dielectric layer disposed on an inside surface of a trench; and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate, wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit, wherein the second substrate includes a sense capacitor, wherein one electrode is formed by a device substrate connected through a conductive substrate bond to a first contact coupled to the inner portion and another electrode is formed by a second contact coupled to the outer portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification