Apparatus and method for coating organic film

• US 9,425,400 B2
• Filed: 12/16/2013
• Issued: 08/23/2016
• Est. Priority Date: 06/09/2013
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd.
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Shen, Wulin, Jiang, Chunsheng, Dai, Qing, Chen, Haijing, Yuan, Guangcai, Fang, Jingang
• Primary Examiner(s): Ahmadi, Mohsen
• Application Number:
  US14/241,723
• Publication Number:
  US 20150162535A1
• Time in Patent Office: 981 Days
• Field of Search: 438/34, 438/82, 438/99, 438/725, 438780-781, 438/789, 257/E21.007, 257/E21.024, 257/E21.211, 257/E21.242, 257/E21.299
• US Class Current: 1/1
• CPC Class Codes: B05B 5/001 incorporating means for heating or cooling, e.g. the material to be sprayed
• CPC Class Codes: B05B 5/0255 spraying and depositing by electrostatic forces only
• CPC Class Codes: B05B 5/03 characterised by the use of gas , e.g. electrostatically assisted pneumatic spraying B05B5/04, B05B5/043, B05B5/047 take precedence
• CPC Class Codes: B05B 5/0533 Electrodes specially adapted therefor; Arrangements of electrodes
• CPC Class Codes: B05B 5/057 Arrangements for discharging liquids or other fluent material without using a gun or nozzle
• CPC Class Codes: B05D 1/007 using an electrostatic field B05D1/02 - B05D1/16 take precedence
• CPC Class Codes: B05D 1/60 Deposition of organic layers from vapour phase vapour phase deposition in general C23C14/00, C23C16/00
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 14/30 by electron bombardment
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/18 using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet

Abstract

An apparatus and method for coating an organic film are disclosed. The apparatus comprises an evaporation device, an electron emission device and a spray device; wherein the evaporation device comprises an evaporation container, the evaporation container is a linear evaporation container, in which a uniform organic gas is generated; the electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas; the spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate.

Claims

1. A method for coating an organic film, wherein the method comprises:

heating and evaporating an organic material to generate uniform organic gas;

uniformly charging the uniform organic gas for obtaining charged organic gas;

accelerating and moving the charged organic gas toward the substrate under an effect of an electric filed to form the organic film on the substrate,

wherein accelerating and moving the charged organic gas toward the substrate under an effect of an electric filed to form the organic film on the substrate comprises;

generating the electric field by a potential difference between an electrode plate arranged in top of a spray chamber and base of the spray chamber, when a bias voltage being applied by an external power supply;

after the charged organic gas reaches the spray chamber, downwardly accelerating and moving the charged organic gas under an effect of a downward electric field force;

after the charged organic gas reaches the spray head arranged at bottom of the spray chamber, spraying the charged organic gas out of the spray head; and

depositing the sprayed organic gas which is passed through a mask to form the organic film on the substrate.

2. The method according to claim 1, wherein heating and evaporating an organic material to generate uniform organic gas comprises:

uniformly heating the organic material to generate the organic gas;

linearly evaporating the organic gas and emitting the uniform organic gas.

3. The method according to claim 1, wherein uniformly charging the uniform organic gas for obtaining charged organic gas comprises:

uniformly emitting electrons and attaching the electrons to the uniform organic gas, such that the uniform organic gas is uniformly charged and the charged organic gas is obtained.