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Module, electronic apparatus and moving object

  • US 9,426,892 B2
  • Filed: 02/19/2014
  • Issued: 08/23/2016
  • Est. Priority Date: 03/01/2013
  • Status: Active Grant
First Claim
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1. A module comprising:

  • a first base that has a first recess in a top surface of the first base;

    a second base that is provided over the first base, the second base having second and third recesses in top and bottom surfaces thereof, respectively;

    a first functional element that is accommodated in an internal space, which is provided by the first and third recesses, at least a part of the first functional element being surrounded by the first base and the second base; and

    a second functional element that is mounted in a bottom surface of the second recess, whereinthe third recess is larger than the first recess in a plan view,the first base is larger than the second base in the plan view, andthe first functional element is a physical quantity sensor having movable and fixed electrodes, and the movable electrodes are completely enclosed by an outer edge of the first recess in the plan view.

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