DNA sequencing using a suspended carbon nanotube

• US 9,428,805 B2
• Filed: 09/26/2013
• Issued: 08/30/2016
• Est. Priority Date: 08/30/2013
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Afzali-Ardakani, Ali, Franklin, Aaron D., Tulevski, George S.
• Primary Examiner(s): DIETERLE, JENNIFER M
• Application Number:
  US14/037,874
• Publication Number:
  US 20150060283A1
• Time in Patent Office: 1,069 Days
• US Class Current: 1/1
• CPC Class Codes: C12Q 1/6869 Methods for sequencing
• CPC Class Codes: C12Q 2563/155 Particles of a defined size, e.g. nanoparticles
• CPC Class Codes: G01N 27/44791 Microapparatus sample containers with integrated microfluidic structures B01L3/5027
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68

Abstract

A technique is provided for forming a nanodevice for sequencing. A bottom metal contact is disposed at a location in an insulator that is on a substrate. A nonconducting material is disposed on top of the bottom metal contact and the insulator. A carbon nanotube is disposed on top of the nonconducting material. Top metal contacts are disposed on top of the carbon nanotube at the location of the bottom metal contact, where the top metal contacts are formed at opposing ends of the carbon nanotube at the location. The carbon nanotube is suspended over the bottom metal contact at the location, by etching away the nonconducting material under the carbon nanotube to expose the bottom metal contact as a bottom of a trench, while leaving the nonconducting material immediately under the top metal contacts as walls of the trench.

Claims

1. A device for sequencing, the device comprising:

a bottom metal contact formed at a location in an insulator that is on a substrate;

a nonconducting material disposed on top of the bottom metal contact and the insulator;

a carbon nanotube disposed on top of the nonconducting material; and

top metal contacts disposed on top of the carbon nanotube at the location of the bottom metal contact, wherein the top metal contacts are formed at opposing ends of the carbon nanotube at the location; and

wherein the carbon nanotube is suspended over the bottom metal contact at the location, based on etching away the nonconducting material under the carbon nanotube to expose the bottom metal contact as a bottom of a trench, while leaving the nonconducting material immediately under the top metal contacts as walls of the trench.

2. The device of claim 1, wherein the carbon nanotube is suspended over the trench.

3. The device of claim 1, wherein the top metal contacts are on opposing sides of the trench.

4. The device of claim 1, wherein the top metal contacts are electrically connected to one another through the carbon nanotube.

5. The device of claim 1, wherein a thickness of the nonconducting material determines a depth of the trench.

6. The device of claim 1, wherein a distance separating the top metal contacts determines a width of the trench;

and

wherein a length of the top metal contacts determines a length of the trench.

7. The device of claim 1, further comprising multiple trenches each having its own corresponding bottom metal contact, wherein one carbon nanotube is respectively suspended over one of the multiple trenches on a one-to-one basis.