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Integration of a MEMS beam with optical waveguide and deflection in two dimensions

  • US 9,435,952 B2
  • Filed: 06/10/2013
  • Issued: 09/06/2016
  • Est. Priority Date: 06/10/2013
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a deflectable MEMS optical beam waveguide which is formed in an integrated circuit; and

    a plurality of deflection electrodes positioned around the deflectable MEMS optical beam waveguide to provide two-dimensional deflection control for the deflectable MEMS optical beam waveguide in response to application of one or more deflection voltages.

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