System on a chip using integrated MEMS and CMOS devices

• US 9,440,846 B2
• Filed: 07/28/2014
• Issued: 09/13/2016
• Est. Priority Date: 10/28/2009
• Status: Active Grant

• Current Assignee: Movella Incorporated (Movella Holdings, Inc.)
• Original Assignee: mCube, Inc.
• Inventors: Yang, Xiao Charles
• Primary Examiner(s): Pham, Thanh V
• Application Number:
  US14/445,012
• Publication Number:
  US 20150307347A1
• Time in Patent Office: 778 Days
• US Class Current: 1/1
• CPC Class Codes: B81B 2207/015 the micromechanical device and the control or processing electronics being integrated on the same substrate
• CPC Class Codes: B81C 1/00246 Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
• CPC Class Codes: B81C 1/00396 Mask characterised by its composition, e.g. multilayer masks
• CPC Class Codes: B81C 1/00626 Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
• CPC Class Codes: B81C 2201/0198 for making a masking layer
• CPC Class Codes: B81C 2203/0136 Growing or depositing of a covering layer

Abstract

An integrated MEMS system in which CMOS and MEMS devices are provided to form an integrated CMOS-MEMS system. The system can include a silicon substrate layer, a CMOS layer, MEMS and CMOS devices, and a wafer level packaging (WLP) layer. The CMOS layer can form an interface region, one which any number of CMOS MEMS devices can be configured.

Claims

1. A method for forming a multiple MEMS and CMOS system, comprising:

providing a semiconductor substrate having a surface region;

forming a CMOS IC layer overlying the surface region of the semiconductor substrate, the CMOS IC layer having at least one CMOS device being configured to provide a logic and a memory array, the CMOS IC layer having an interface region overlying the at least one CMOS device;

forming at least a first micro electrical mechanical system (MEMS) configured in a first region overlying a first portion of the interface region, wherein the first MEMS is configured to sense first physical perturbations, wherein the first MEMS includes a MEMS transducer comprising;

forming a movable base having four intermediate cavities disposed in an intermediate portion of the movable base structure, the four intermediate cavities each having a cavity surface region;

forming four intermediate anchor structures spatially disposed within the four intermediate cavities, each of the intermediate anchor structures being coupled to at least one portion of the surface region;

forming four intermediate spring structure coupled to at least one portion of each of the cavity surface region, the intermediate spring structures being coupled to the intermediate anchor structures, the spring structures being spatially oriented to be substantially 45degrees or substantially (pi/4) radians to the edges of a die; and

forming a second MEMS configured in a second region overlying a second portion of the interface region, wherein the second MEMS is configured to sense second physical perturbations, the first physical perturbations being different from the second physical perturbations.

2. The method of claim 1 wherein the first MEMS is fabricated from a deposited material that is used to fabricate the second MEMS.

3. The method of claim 1 wherein the first MEMS is fabricated using a mask layer that is used to fabricated the second MEMS.

4. The method of claim 1 wherein the first MEMS is fabricated using a semiconductor process that is used in fabricating the second MEMS.

5. The method of claim 1 further comprising forming a third MEMS configured in one or more third regions and a fourth MEMS configured in one or more fourth regions;

whereupon the third MEMS is different from the fourth MEMS.

6. The method of claim 1 wherein the first MEMS comprises an accelerometer, the second MEMS comprises a gyroscope, the third MEMS comprises a magnetic sensor, and the fourth MEMS comprises a pressure sensor;

wherein the gyroscope comprises;

eight gyro anchor structures, the gyro anchor structures being coupled to at least one portion of the surface region;

two gyro frame structure, the gyro frame structure(s) spatially disposed overlying at least one portion of the surface region;

four gyro peripheral structures, the peripheral movable structures spatially disposed overlying at least one portion of the surface region;

two gyro central movable structures, the central movable structures spatially disposed overlying at least one portion of the surface region;

eight first gyro flexible members, the first gyro flexible members being structures; and

eight second gyro flexible members, the second gyro flexible members being coupled to at least one portion of the gyro frame structures and the gyro peripheral movable structures; and

eight gyro flexible structure members, the gyro flexible structure members being coupled to at least one portion of the gyro peripheral movable structures and the gyro central movable structures;

wherein the gyroscope is configured to have each central movable structures coupled to two of the peripheral movable structures by four gyro flexible structure members;

wherein two peripheral movable structures are coupled to each gyro frame structure by four second gyro flexible members; and

wherein four of the gyro anchor structures are coupled to each of the gyro frame structures by four first gyro flexible members.

7. The method of claim 1 wherein the first MEMS and the second MEMS comprise one or more bonded materials.

8. The method of claim 1 wherein the MEMS transducer further comprises at least one capacitor element spatially configured within a vicinity of the cavity surface region(s) of the movable base structure, wherein the at least one capacitor element includes a fixed capacitor element and a movable capacitor element.

9. The method of claim 1 wherein the first MEMS is at least a three axis accelerometer and the second MEMS is at least a six axis inertial sensing device.

10. The method of claim 1 wherein the semiconductor substrate is encapsulated within a package, and wherein the system further comprises:

a memory configured to store executable instructions;

a display configured to output data to a user; and

a processor electrically coupled to the memory and to the package, wherein the processor is configured to execute executable instructions from memory, wherein the processor is configured to receive signals from the first MEMS device in response to the first physical perturbations, wherein the processor is configured to perform one or more tasks in response to the signals from the first MEMS device, wherein the processor is configured to receive signals from the second MEMS device in response to the second physical perturbations, and wherein the processor is configured to perform one or more tasks in response to the signals from the second MEMS device.

11. A method for forming a multiple MEMS and CMOS system, comprising:

forming a semiconductor substrate having a surface region;

forming a CMOS IC layer overlying the surface region of the semiconductor substrate, the CMOS IC layer having at least one CMOS device being configured to provide a logic and a memory array, the CMOS IC layer having an interface region overlying the at least one CMOS device;

forming at least a first micro electrical mechanical system (MEMS) configured in a first region overlying a first portion of the interface region, wherein the first MEMS is configured to sense first physical perturbations, wherein the first MEMS includes a MEMS differential gyroscope;

wherein the gyroscope comprises;

eight gyro anchor structures, the gyro anchor structures being coupled to at least one portion of the surface region;

two gyro frame structure, the gyro frame structure(s) spatially disposed overlying at least one portion of the surface region;

four gyro peripheral structures, the peripheral movable structures spatially disposed overlying at least one portion of the surface region;

two gyro central movable structures, the central movable structures spatially disposed overlying at least one portion of the surface region;

eight first gyro flexible members, the first gyro flexible members being coupled to at least one portion of the gyro anchor structures and the gyro frame structures; and

eight second gyro flexible members, the second gyro flexible members being coupled to at least one portion of the gyro frame structures and the gyro peripheral movable structure(s); and

eight gyro flexible structure members, the gyro flexible structure members being coupled to at least one portion of the gyro peripheral movable structures and the gyro central movable structures;

wherein the gyroscope is configured to have each central movable structures coupled to two of the peripheral movable structures by four gyro flexible structure members;

wherein two peripheral movable structures are coupled to each gyro frame structure by four second gyro flexible members; and

wherein four of the gyro anchor structures are coupled to each of the gyro frame structures by four first gyro flexible members; and

forming a second MEMS configured in a second region overlying a second portion of the interface region, wherein the second MEMS is configured to sense second physical perturbations, the first physical perturbations being different from the second physical perturbations.