Method of manufacturing light-emitting device

• US 9,440,880 B2
• Filed: 06/15/2012
• Issued: 09/13/2016
• Est. Priority Date: 06/17/2011
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Shimomura, Akihisa
• Primary Examiner(s): Patel, Nimeshkumar
• Assistant Examiner(s): Stern, Jacob R
• Application Number:
  US13/524,203
• Publication Number:
  US 20120318023A1
• Time in Patent Office: 1,551 Days
• Field of Search: 313/512, 445/25
• US Class Current: 1/1
• CPC Class Codes: C03C 27/06 Joining glass to glass by processes other than fusing fusing C03B23/20; units for use as elements for closing wall or like openings and comprising two or more parallel glass panes in spaced relationship, the panes being permanently secured together E06B3/66

Abstract

A method of manufacturing a sealed structure with excellent hermeticity and a method of manufacturing a light-emitting device sealed with the sealed structure. In the methods of manufacturing a sealed structure and a light-emitting device using a glass frit layer, a first step of forming a buffer layer for preventing a crack generated in a substrate and the glass frit layer by laser light irradiation, a second step of forming the glass frit layer to overlap with the buffer layer over the substrate, and a third step of welding the substrates by irradiating the glass frit layer or the buffer layer with laser light are performed, whereby a sealed structure with high hermeticity and a reliable light-emitting device sealed with the sealed structure can be manufactured. By applying the method of manufacturing a light-emitting device especially to an organic EL element, a highly reliable light-emitting device can be obtained.

Claims

1. A method of manufacturing a light-emitting device, comprising the steps of:

forming a light-emitting element over a first substrate;

forming a sealing material layer over the first substrate, whereby the light-emitting element is surrounded by the sealing material layer;

forming a metal film by using a sputtering method over a second substrate;

forming a buffer layer over the second substrate in a closed pattern by selectively etching the metal film;

forming a frit paste comprising a frit material and a binder over the buffer layer, whereby the buffer layer is interposed between the frit paste and the second substrate, and an entity of the frit paste overlaps with the buffer layer;

removing the binder and fusing the frit material by heat treatment, whereby a glass frit is formed;

stacking the first substrate comprising the sealing material layer and the second substrate comprising the glass frit, whereby the first substrate and the second substrate are bonded with the sealing material layer and the light-emitting element is surrounded by the glass frit; and

irradiating the buffer layer with laser light passing through the second substrate to melt the glass frit by a heat from the buffer layer heated by the irradiation, whereby the glass frit and the first substrate are bonded,

wherein the buffer layer is arranged for surrounding the light-emitting element after stacking the first substrate and the second substrate, and

wherein the second substrate is capable of transmitting the laser light.

2. The method of manufacturing a light-emitting device according to claim 1, wherein the glass frit forms a closed curve shape.

3. The method of manufacturing a light-emitting device according to claim 1, wherein an enclosed space is formed by the glass frit, the first substrate, and the second substrate.

4. The method of manufacturing a light-emitting device according to claim 1, wherein the sealing material layer forms a closed curve shape.

5. The method of manufacturing a light-emitting device according to claim 1, wherein the sealing material layer, the first substrate, and the second substrate form an enclosed space.

6. The method of manufacturing a light-emitting device according to claim 1, wherein the sealing material layer comprises a material selected from an ultraviolet curable resin and an epoxy resin.

7. The method of manufacturing a light-emitting device according to claim 1, wherein the buffer layer is capable of absorbing the laser light.

8. The method of manufacturing a light-emitting device according to claim 1, wherein the buffer layer comprises a material having a higher melting point than the glass frit.

9. The method of manufacturing a light-emitting device according to claim 8, wherein the material is selected from tungsten, tantalum, and iron.

10. A method of manufacturing a light-emitting device, comprising the steps of:

forming a light-emitting element over a first substrate;

forming a metal film by using a sputtering method over a second substrate;

forming a buffer layer over the second substrate in a closed pattern by selectively etching the metal film;

forming a frit paste comprising a frit material and a binder over the buffer layer, whereby the buffer layer is interposed between the frit paste and the second substrate, and an entity of the frit paste overlaps with the buffer layer;

removing the binder and fusing the fit material by heat treatment, whereby a glass frit is formed;

stacking the first substrate and the second substrate comprising the glass frit, whereby the light-emitting element is surrounded by the glass frit; and

irradiating the buffer layer with laser light passing through the second substrate to melt the glass frit by a heat from the buffer layer heated by the irradiation, whereby the glass frit and the first substrate are bonded,

wherein the buffer layer is arranged for surrounding the light-emitting element after stacking the first substrate and the second substrate.

11. The method of manufacturing a light-emitting device according to claim 10, wherein the buffer layer is selected from tungsten, tantalum and iron.

12. The method of manufacturing a light-emitting device according to claim 10, wherein the glass frit forms a closed curve shape.

13. The method of manufacturing a light-emitting device according to claim 10, wherein an enclosed space is formed by the glass frit, the first substrate, and the second substrate.

14. A method of manufacturing a light-emitting device, comprising the steps of:

forming a light-emitting element over a first substrate;

forming a sealing material layer over the first substrate, whereby the light-emitting element is surrounded by the sealing material layer;

forming a metal film over a second substrate;

forming a buffer layer over the second substrate in a closed pattern by selectively etching the metal film;

forming a fit paste comprising a frit material and a binder over the buffer layer, whereby the buffer layer is interposed between the frit paste and the second substrate, and an entity of the frit paste overlaps with the buffer layer;

removing the binder and fusing the frit material by heat treatment, whereby a glass frit is formed;

stacking the first substrate comprising the sealing material layer and the second substrate comprising the glass frit, whereby the first substrate and the second substrate are bonded with the sealing material layer and the light-emitting element is surrounded by the glass frit; and

irradiating the buffer layer with laser light passing through the second substrate to melt the glass frit by a heat from the buffer layer heated by the irradiation, whereby the glass fit and the first substrate are bonded,

wherein the buffer layer is arranged for surrounding the light-emitting element after stacking the first substrate and the second substrate, and

wherein the second substrate is capable of transmitting the laser light.

15. The method of manufacturing a light-emitting device according to claim 14, wherein the glass frit forms a closed curve shape.

16. The method of manufacturing a light-emitting device according to claim 14, wherein an enclosed space is formed by the glass frit, the first substrate, and the second substrate.

17. The method of manufacturing a light-emitting device according to claim 14, wherein the sealing material layer forms a closed curve shape.

18. The method of manufacturing a light-emitting device according to claim 14, wherein the sealing material layer, the first substrate, and the second substrate form an enclosed space.

19. The method of manufacturing a light-emitting device according to claim 14, wherein the sealing material layer comprises a material selected from an ultraviolet curable resin and an epoxy resin.

20. The method of manufacturing a light-emitting device according to claim 14, wherein the buffer layer comprises one selected from tungsten, tantalum, and iron.