Optical waveguide with mirror, optical fiber connector, and manufacturing method thereof

• US 9,442,251 B2
• Filed: 12/28/2012
• Issued: 09/13/2016
• Est. Priority Date: 01/10/2012
• Status: Expired due to Fees

• Current Assignee: Hitachi Chemical Company Limited (Resonac Holdings Corp.)
• Original Assignee: Hitachi Chemical Company Limited (Resonac Holdings Corp.)
• Inventors: Sakai, Daichi, Betsui, Hiroshi, Kuroda, Toshihiro, Segawa, Kouta, Uchigasaki, Masao
• Primary Examiner(s): Radkowski, Peter
• Application Number:
  US14/371,566
• Publication Number:
  US 20140321807A1
• Time in Patent Office: 1,355 Days
• Field of Search: 385/14, 385/31, 430/321
• US Class Current: 1/1
• CPC Class Codes: G02B 2006/12166 Manufacturing methods
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
• CPC Class Codes: G03F 7/16 Coating processes; Apparatus therefor applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74

Abstract

The optical waveguide with mirror 10 of the present invention includes: a lower clad layer 22; a core pattern 24 formed above the lower clad layer 22; a mirror 30 formed on the inclined surface 31 of the core pattern 24; an upper clad layer 26 covering the part other than the mirror 30 on the core pattern 24; and an opening 26a with an approximate pillar shape, the opening being formed on the upper clad layer 26, wherein the mirror 30 is formed in the opening 26a.

Claims

1. An optical waveguide with mirror, comprising:

a lower clad layer;

a core pattern formed above the lower clad layer;

a mirror formed on an inclined surface of the core pattern;

an upper clad layer covering a part other than the mirror on the core pattern; and

an opening with an approximate pillar shape, the opening being formed in the upper clad layer,

wherein the mirror is formed in the opening,

wherein inner walls of the opening are not provided on the same plane as the inclined surface, and

wherein a part of a side surface of the core pattern adjacent the mirror is exposed in the opening.

2. The optical waveguide with mirror according to claim 1, wherein the upper side, the lower side, and the both lateral sides of the inclined surface are placed in the opening.

3. The optical waveguide with mirror according to claim 1, further comprising a void between at least one of the upper side, the lower side, and the both lateral sides of the mirror and the inner wall of the opening, viewed in the thickness direction of the optical waveguide with mirror.

4. The optical waveguide with mirror according to claim 1, further comprising a clad inclined surface formed on the lower clad layer in the opening, the clad inclined surface being on the same plane as the inclined surface and continuing from the inclined surface, wherein the clad inclined surface extends outside at least one of the both lateral sides of the mirror.

5. The optical waveguide with mirror according to claim 1, wherein

the core pattern forms an optical path through which a light signal transmits,

the mirror changes the direction of a light signal so that a light signal transmits through the optical path exits from the clad layer and so that a light signal entering from the lower clad layer transmits through the optical path, and the mirror is formed on the optical path.

6. The optical waveguide with mirror according to claim 1, wherein the mirror is a dummy mirror for recognizing the position of the mirror.

7. The optical waveguide with mirror according to claim 1, wherein the opening is a void.

8. The optical waveguide with mirror according to claim 1, further comprising a cover member covering the opening.

9. The optical waveguide with mirror according to claim 8, wherein the void between the mirror and the cover member connects to the space outside of the optical waveguide with mirror at only one position.

10. The optical waveguide with mirror according to claim 9, further comprising an air vent path connecting the void to the space outside of the optical waveguide with mirror, the air vent path being formed on the lower clad layer or the upper clad layer.

11. The optical waveguide with mirror according to claim 9, further comprising a spacer layer between the upper clad layer and the cover member, wherein the air vent path connects the void to the space outside of the optical waveguide with mirror is formed on the spacer layer.

12. The optical waveguide with mirror according to claim 10, wherein the air vent path is formed by photolithography.

13. The optical waveguide with mirror according to claim 10, wherein the air vent path extends to the side opposite to the side on which the core pattern is provided in an axial direction of the core pattern in which the optical path is changed by the mirror.

14. The optical waveguide with mirror according to claim 1, further comprising a resin member filled in the opening.

15. The optical waveguide with mirror according to claim 14, wherein the resin member is formed from a photosensitive resin composition.

16. The optical waveguide with mirror according to claim 15, wherein

the lower clad layer, the upper clad layer, and the core pattern are formed from a resin composition for a lower clad layer, a resin composition for an upper clad layer, and a resin composition for a core pattern, respectively, and

the photosensitive resin composition is any one of the resin composition for a lower clad layer, the resin composition for an upper clad layer, and the resin composition for a core pattern.

17. The optical waveguide with mirror according to claim 1, wherein the mirror has a metal layer formed on the inclined surface.

18. The optical waveguide with mirror according to claim 17, wherein the metal layer is provided on at least one of the upper surface of the core pattern, the lateral surfaces of the core pattern, and the lower clad layer which are exposed in the opening.

19. The optical waveguide with mirror according to claim 17, wherein the metal layer formed on the inclined surface reflects a light signal transmitting through the core pattern and a light signal entering from the lower clad layer.

20. An optical fiber connector comprising:

the optical waveguide with mirror according to claim 1;

a substrate to which the optical waveguide is laminated; and

an optical fiber guide pattern laminated to the substrate, the optical fiber guide pattern forming a groove to which an optical fiber is introduced so that the optical fiber optically connects with the optical path of the core pattern.