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Method and apparatus for beam control with optical MEMS beam waveguide

  • US 9,442,254 B2
  • Filed: 06/10/2013
  • Issued: 09/13/2016
  • Est. Priority Date: 06/10/2013
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • beam control circuitry for controlling deflection of a first cantilevered MEMS optical beam waveguide, comprising;

    a plurality of separate deflection electrodes positioned to control deflection of the first cantilevered MEMS optical beam waveguide, the separate deflection electrodes comprising a vertical deflection electrode positioned above the first cantilevered MEMS optical beam waveguide and a plurality of separate lateral deflection electrodes positioned on at least a first side of the first cantilevered MEMS optical beam waveguide; and

    a bias circuit connected to provide separately controllable bias voltages to the plurality of separate deflection electrodes, thereby generating controlled, two-dimensional deflection of the first cantilevered MEMS optical beam waveguide.

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