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Charged particle beam apparatus, specimen observation system and operation program

  • US 9,443,694 B2
  • Filed: 03/15/2013
  • Issued: 09/13/2016
  • Est. Priority Date: 03/16/2012
  • Status: Active Grant
First Claim
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1. A charged particle beam apparatus comprising:

  • a processor configured to have an image display screen, in an image display device, display a set of observation target setting buttons for changing an observation condition for a specimen, the observation condition comprising a combination of parameter setting values of the charged particle beam apparatus,wherein the processor controls the image display screen to display an observation condition characteristic indicator including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons,wherein the processor responds to a selection of an observation target setting button by comparing a selected image to be observed corresponding to the selected observation target setting button with a standard image to be observed under a default observation condition so as to display a highlighted image corresponding to the selected image with emphasis on the difference between the selected image and the standard image, andwherein, the specimen is irradiated with a charged particle beam in accordance with the selected observation target setting button.

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