Semiconductor device and method of embedding thermally conductive layer in interconnect structure for heat dissipation
First Claim
1. A semiconductor device, comprising:
- a first semiconductor die;
a first thermally conductive layer formed over the first semiconductor die;
an interconnect structure formed over the first semiconductor die; and
a first conductive via formed through the first semiconductor die.
1 Assignment
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Accused Products
Abstract
A semiconductor device has a first thermally conductive layer formed over a first surface of a semiconductor die. A second surface of the semiconductor die is mounted to a sacrificial carrier. An encapsulant is deposited over the first thermally conductive layer and sacrificial carrier. The encapsulant is planarized to expose the first thermally conductive layer. A first insulating layer is formed over the second surface of the semiconductor die and a first surface of the encapsulant. A portion of the first insulating layer over the second surface of the semiconductor die is removed. A second thermally conductive layer is formed over the second surface of the semiconductor die within the removed portion of the first insulating layer. An electrically conductive layer is formed within the insulating layer around the second thermally conductive layer. A heat sink can be mounted over the first thermally conductive layer.
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Citations
25 Claims
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1. A semiconductor device, comprising:
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a first semiconductor die; a first thermally conductive layer formed over the first semiconductor die; an interconnect structure formed over the first semiconductor die; and a first conductive via formed through the first semiconductor die. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor device, comprising:
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a first semiconductor die; a first thermally conductive layer formed over the first semiconductor die; and a first conductive via formed through the first semiconductor die. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A semiconductor device, comprising:
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a first semiconductor die; a first thermally conductive layer formed over the first semiconductor die; and an encapsulant deposited over the first semiconductor die and first thermally conductive layer. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A semiconductor device, comprising:
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a first semiconductor die; and a first thermally conductive layer formed over the first semiconductor die within a footprint of the first semiconductor die. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification