Thermoelectrical device and method for manufacturing same
First Claim
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1. A method for manufacturing a thermoelectrical device, the method comprising:
- providing a substrate;
forming at least one deep trench comprising a cavity into the substrate, after providing the substrate; and
forming at least one thermocouple which comprises two conducting paths after forming the deep trench, wherein a first conducting path comprises a first conductive material and a second conducting path comprises a second conductive material, such that at least the first conducting path is embedded in the deep trench of the substrate;
wherein the two conducting paths are directly electrically connected at the bottom of the deep trench by a material-junction of the two conducting paths, and wherein the two conducting paths are isolated from each other along the deep trench with exception of the material-junction, and wherein the material-junction comprises an interface wherein a surface of the first conducting path is in direct contact with a surface of the second conducting path;
wherein forming the thermocouple is performed such that the first and the second conducting path are embedded in the deep trench and such that the second conducting path is surrounded by the first conducting path;
wherein the two conducting paths are isolated by an insulating layer along a length of at least one of the two conducting paths and the two conducting paths are electrically connected at an end portion of one of the two conducting paths residing at a bottom portion of the deep trench.
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Abstract
A method for manufacturing a thermoelectrical device includes providing a substrate and also forming at least one deep trench into the substrate. The method further includes forming at least one thermocouple which comprises two conducting paths, wherein a first conducting path comprises a first conductive material and a second conducting path comprises a second conductive material, such that at least the first conducting path is embedded in the deep trench of the substrate.
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Citations
16 Claims
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1. A method for manufacturing a thermoelectrical device, the method comprising:
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providing a substrate; forming at least one deep trench comprising a cavity into the substrate, after providing the substrate; and forming at least one thermocouple which comprises two conducting paths after forming the deep trench, wherein a first conducting path comprises a first conductive material and a second conducting path comprises a second conductive material, such that at least the first conducting path is embedded in the deep trench of the substrate; wherein the two conducting paths are directly electrically connected at the bottom of the deep trench by a material-junction of the two conducting paths, and wherein the two conducting paths are isolated from each other along the deep trench with exception of the material-junction, and wherein the material-junction comprises an interface wherein a surface of the first conducting path is in direct contact with a surface of the second conducting path; wherein forming the thermocouple is performed such that the first and the second conducting path are embedded in the deep trench and such that the second conducting path is surrounded by the first conducting path;
wherein the two conducting paths are isolated by an insulating layer along a length of at least one of the two conducting paths and the two conducting paths are electrically connected at an end portion of one of the two conducting paths residing at a bottom portion of the deep trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for manufacturing a thermoelectrical device, the method comprising:
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providing a substrate; forming at least one deep trench into the substrate; and forming at least one thermocouple which comprises two conducting paths, wherein a first conducting path comprises a first conductive material and a second conducting path comprises a second conductive material, such that at least the first conducting path is embedded in the deep trench of the substrate; wherein the two conducting paths are directly electrically connected at the bottom of the deep trench by a material-junction of the two conducting paths, and wherein the two conducting paths are isolated from each other along the deep trench with exception of the material-junction, and wherein the material-junction comprises an interface wherein a surface of the first conducting path is in direct contact with a surface of the second conducting path; wherein forming the thermocouple is performed such that the first and the second conducting path are embedded in the deep trench and such that the second conducting path is surrounded by the first conducting path;
wherein the two conducting paths are isolated by an insulating layer along a length of one of the conducting paths and the two conducting paths are electrically connected at an end portion of the one of the conducting paths residing at a bottom portion of the deep trench;wherein forming the at least one thermocouple comprises; depositing an insulating layer in the deep trench; and depositing or filling at least the first conductive material into the deep trench after depositing the insulating layer.
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Specification