Display substrate, manufacturing method thereof and flexible display device
First Claim
1. A display substrate, comprising:
- a flexible base substrate and a vulnerable member arranged on the flexible base substrate, whereinthe display substrate further comprises a patterned stress absorption layer arranged between the flexible base substrate and the vulnerable member so that the patterned stress absorption layer is only arranged below the vulnerable member; and
the projection of the vulnerable member on the flexible base substrate is within the projection region of the patterned stress absorption layer on the flexible base substrate;
wherein the patterned stress absorption layer is arranged above the flexible base substrate by depositing a material layer of the stress absorption layer by adopting a plasma enhanced chemical vapor deposition method, and performing a patterning process on the material layer by adopting a mask plate corresponding to the shape of the vulnerable member to form the patterned stress absorption layer.
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Abstract
The invention provides a display substrate, a manufacturing method thereof and a flexible display device. The display substrate in the present invention includes a base substrate and a vulnerable member arranged on the base substrate, as well as a stress absorption layer arranged between the base substrate and the vulnerable member, wherein the projection of the vulnerable member on the base substrate is within the projection region of the stress absorption layer on the base substrate; the stress absorption layer is not arranged on part of the base substrate. Since the display substrate and the flexible display device provided by the present invention are provided with the stress absorption layer, stress generated during bending may be dispersed through the stress absorption layer to protect the vulnerable member from being damaged, so as to improve the reliability of the display substrate and the flexible display device.
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Citations
19 Claims
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1. A display substrate, comprising:
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a flexible base substrate and a vulnerable member arranged on the flexible base substrate, wherein the display substrate further comprises a patterned stress absorption layer arranged between the flexible base substrate and the vulnerable member so that the patterned stress absorption layer is only arranged below the vulnerable member; and the projection of the vulnerable member on the flexible base substrate is within the projection region of the patterned stress absorption layer on the flexible base substrate; wherein the patterned stress absorption layer is arranged above the flexible base substrate by depositing a material layer of the stress absorption layer by adopting a plasma enhanced chemical vapor deposition method, and performing a patterning process on the material layer by adopting a mask plate corresponding to the shape of the vulnerable member to form the patterned stress absorption layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for manufacturing a display substrate, comprising the following steps:
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preparing a base substrate; arranging a stress absorption layer above the base substrate; and arranging a vulnerable member above the stress absorption layer, wherein the projection of the vulnerable member on the base substrate is within the projection region of the stress absorption layer on the base substrate; wherein the step of arranging the stress absorption layer above the base substrate comprises;
depositing a material layer of the stress absorption layer by adopting a plasma enhanced chemical vapor deposition method, and performing a patterning process on the material layer by adopting a mask plate corresponding to the shape of the vulnerable member to form the pattern of the stress absorption layer. - View Dependent Claims (17, 18, 19)
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Specification