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Display substrate, manufacturing method thereof and flexible display device

  • US 9,444,061 B2
  • Filed: 05/21/2014
  • Issued: 09/13/2016
  • Est. Priority Date: 10/12/2013
  • Status: Active Grant
First Claim
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1. A display substrate, comprising:

  • a flexible base substrate and a vulnerable member arranged on the flexible base substrate, whereinthe display substrate further comprises a patterned stress absorption layer arranged between the flexible base substrate and the vulnerable member so that the patterned stress absorption layer is only arranged below the vulnerable member; and

    the projection of the vulnerable member on the flexible base substrate is within the projection region of the patterned stress absorption layer on the flexible base substrate;

    wherein the patterned stress absorption layer is arranged above the flexible base substrate by depositing a material layer of the stress absorption layer by adopting a plasma enhanced chemical vapor deposition method, and performing a patterning process on the material layer by adopting a mask plate corresponding to the shape of the vulnerable member to form the patterned stress absorption layer.

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