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Functional device, acceleration sensor, and switch

  • US 9,446,937 B2
  • Filed: 11/26/2014
  • Issued: 09/20/2016
  • Est. Priority Date: 12/26/2013
  • Status: Active Grant
First Claim
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1. A functional device comprising:

  • a substrate; and

    a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate,wherein the movable section includes a plurality of first shaft portions with relatively high rigidity,the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another,protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions,the movable section includes a second shaft portion connected to one end or both ends of each of the plurality of first shaft portions,each of the protrusions is provided to face a connection point between each of the first shaft portions and the second shaft portion,the movable section includes a third shaft portion supporting the first and second shaft portions, andthe plurality of first shaft portions have line symmetry with respect to the third shaft portion.

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