Functional device, acceleration sensor, and switch
First Claim
Patent Images
1. A functional device comprising:
- a substrate; and
a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate,wherein the movable section includes a plurality of first shaft portions with relatively high rigidity,the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another,protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions,the movable section includes a second shaft portion connected to one end or both ends of each of the plurality of first shaft portions,each of the protrusions is provided to face a connection point between each of the first shaft portions and the second shaft portion,the movable section includes a third shaft portion supporting the first and second shaft portions, andthe plurality of first shaft portions have line symmetry with respect to the third shaft portion.
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Abstract
A functional device includes: a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, in which the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.
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Citations
13 Claims
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1. A functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions, the movable section includes a second shaft portion connected to one end or both ends of each of the plurality of first shaft portions, each of the protrusions is provided to face a connection point between each of the first shaft portions and the second shaft portion, the movable section includes a third shaft portion supporting the first and second shaft portions, and the plurality of first shaft portions have line symmetry with respect to the third shaft portion. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions, the movable section includes a plurality of first electrodes provided to be protruded from each of the first shaft portions, and a plurality of second electrodes are further included, the second electrodes being provided integrally with the substrate and alternately arranged with the first electrodes of the movable section. - View Dependent Claims (9)
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10. An acceleration sensor provided with a functional device, the functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions, the movable section includes a plurality of first electrodes provided to be protruded from each of the first shaft portions, a plurality of second electrodes are further included, the second electrodes being provided integrally with the substrate and alternately arranged with the first electrodes of the movable section, and the movable section are arranged to allow intervals between the first electrodes and the second electrodes to be equal to one another in a no-voltage application state. - View Dependent Claims (11)
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12. A switch provided with a functional device, the functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions, the movable section includes a plurality of first electrodes provided to be protruded from each of the first shaft portions, a plurality of second electrodes are further included, the second electrodes being provided integrally with the substrate and alternately arranged with the first electrodes of the movable section, and the movable section is arranged in a position shifted along the first direction from a position where intervals between the first electrodes and the second electrodes are equal to one another in a no-voltage application state. - View Dependent Claims (13)
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Specification