Vicinal surfaces of polycrystalline structures

• US 9,446,949 B2
• Filed: 02/22/2013
• Issued: 09/20/2016
• Est. Priority Date: 02/22/2012
• Status: Active Grant

• Current Assignee: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD. (Technion-Israel Institute Of Technology)
• Original Assignee: UAB Research Foundation (University of Alabama System)
• Inventors: Borukhin, Shirly, Pokroy, Boaz
• Primary Examiner(s): Sheikh, Humera
• Assistant Examiner(s): Wang, Lucas
• Application Number:
  US13/774,400
• Publication Number:
  US 20130216780A1
• Time in Patent Office: 1,306 Days
• Field of Search: 257/496
• US Class Current: 1/1
• CPC Class Codes: B82B 3/0038 Manufacturing processes for forming specific nanostructures not provided for in groups B82B3/0014 - B82B3/0033
• CPC Class Codes: C23C 14/0005 Separation of the coating from the substrate
• CPC Class Codes: C23C 16/01 on temporary substrates, e.g. substrates subsequently removed by etching
• CPC Class Codes: H01L 21/02428 Structure
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Abstract

The present invention provides vicinal surfaces of polycrystalline materials and a method for their preparation. The method includes the deposition of a polycrystalline material on a substrate followed by removing the material from the substrate so as to expose a vicinal surface having stepped terraces. The step of removing the material from the substrate may be preceded by annealing. The vicinal surfaces are useful for a variety of applications.

Claims

1. A polycrystalline material comprising grains, each grain being misoriented with respect to its neighbors, wherein said polycrystalline material comprises misoriented grains throughout its entire thickness and on its surfaces, and wherein at least one surface of the polycrystalline material is a vicinal surface having stepped terraces comprising steps of atomic scale.

2. The polycrystalline material according to claim 1 in the form of a structure having a substantially flat architecture or a three-dimensional architecture.

3. The polycrystalline material according to claim 2, in the form of a polycrystalline film.

4. The polycrystalline material according to claim 1 comprising a metal or a metal alloy.

5. The polycrystalline material according to claim 4, wherein the metal or metal alloy is selected from the group consisting of Au, Ag, Pd, Ni, Co, Pt, Cu, Al, Ir, Mn, Fe, and an alloy thereof.

6. The polycrystalline material according to claim 1 comprising a semiconductor selected from the group consisting of Si, SiO₂, TiO₂, CeO₂, V₂O₅, PbS, AlN, Si₃N₄, InP, GaN, GaP, CdS, CdTe, CdZnTe, GaAs, InAs, InSb, ZnS, ZnSe, and ZnTe.

7. The polycrystalline material according to claim 1, wherein the stepped terraces have step periodicities in the range of about 1 nm to about 500 nm.

8. The polycrystalline material according to claim 1 used for microelectronics, catalysis, direction of nanowire arrays, patterning of nanostructures and magnetic domains or assembling of organic and inorganic molecules.

22. The polycrystalline material according to claim 1, wherein each grain of the at least one vicinal surface has stepped terraces comprising steps of atomic scale.

9. A method of preparing a polycrystalline material comprising grains, each grain being misoriented with respect to its neighbors, wherein said polycrystalline material comprises misoriented grains throughout its entire thickness and on its surfaces, and wherein at least one surface of the polycrystalline material is a vicinal surface having stepped terraces comprising steps of atomic scale, the method comprising the steps of:

a. depositing a polycrystalline material on a substrate;

b. optionally annealing the deposited polycrystalline material on the substrate obtained in step (a); and

c. removing the polycrystalline material obtained in step (a) or (b) from the substrate so as to expose a vicinal surface of the polycrystalline material having stepped terraces comprising steps of atomic scale.

10. The method according to claim 9, wherein the polycrystalline material is in the form of a structure having a substantially flat architecture or a three-dimensional architecture.

11. The method according to claim 10, wherein the polycrystalline material is in the form of a polycrystalline film.

12. The method according to claim 9, wherein the step of depositing a polycrystalline material comprises the use of at least one technique selected from the group consisting of physical vapor deposition (PVD), chemical vapor deposition (CVD), liquid phase epitaxy, solid phase epitaxy, spin coating, dip-coating, screen printing, sol-gel printing, electrodeposition, electroless deposition, and electrophoretic deposition.

13. The method according to claim 9, wherein the polycrystalline material comprises a metal or a metal alloy selected from the group consisting of Au, Ag, Pd, Ni, Co, Pt, Cu, Al, Ir, Mn, Fe, and an alloy thereof.

14. The method according to claim 9, wherein the polycrystalline material comprises a semiconductor selected from the group consisting of Si, SiO₂, TiO₂, CeO₂, V₂O₅, PbS, AlN, Si₃N₄, InP, GaN, GaP, CdS, CdTe, CdZnTe, GaAs, InAs, InSb, ZnS, ZnSe, and ZnTe.

15. The method according to claim 9, wherein the substrate is selected from the group consisting of SiO₂, Al₂O₃, MgO, SrTiO₃, ZnO, GeO₂, TiO, ZrO, CeO₂, V₂O₅, CrO₃, FeO, CuO, NiO, MnO, ZnO, Re₂O₇, MoO₃, W₂O₃, Ta₂O₅, Nb₂O₅ and HfO₂.

16. The method according to claim 9, wherein the substrate comprises SiO₂ in an amorphous or crystalline (quartz) form.

17. The method according to claim 9, wherein the step of annealing is performed at temperatures in the range of about 40-400°

C.

18. The method according to claim 9, wherein the step of removing the polycrystalline material from the substrate comprises stripping the obtained material from the substrate or etching the substrate.

19. The method according to claim 18, wherein the stripping comprises mechanical stripping or chemical stripping.

20. The method according to claim 9, wherein the stepped terraces have step periodicities in the range of about 1 nm to about 500 nm.

21. A polycrystalline material comprising grains, each grain being misoriented with respect to its neighbors, wherein said polycrystalline material comprises misoriented grains throughout its entire thickness and on its surfaces, wherein at least one surface of the polycrystalline material is a vicinal surface having stepped terraces comprising steps of atomic scale, wherein the material is prepared according to a method comprising the steps of:

a. depositing a polycrystalline material on a substrate;

b. optionally annealing the deposited polycrystalline material on the substrate obtained in step (a); and

c. removing the polycrystalline material obtained in step (a) or (b) from the substrate so as to expose a vicinal surface of the polycrystalline material having stepped terraces comprising steps of atomic scale.